Electromechanical Resonators from Atomically Thin Graphite

ORAL

Abstract

We fabricate nanoelectromechanical systems (NEMS) from atomically thin graphite by mechanically exfoliating thin sheets over trenches in SiO$_{2}$. Vibrations with fundamental resonant frequencies in the MHz range are actuated either optically or electrically and detected optically by interferometry. We make a detailed study of the mechanical properties of these resonators including resonance frequency, spring constant, built in tension, and quality factor. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of a two dimensional NEMS.

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Authors

  • Scott Bunch

    Cornell Center for Materials Research, Cornell University

  • Arend van der Zande

    Cornell Center for Materials Research, Cornell University

  • Scott Verbridge

    Cornell Center for Materials Research, Cornell University

  • Ian Frank

    Pomona College

  • David Tanenbaum

    Pomona College

  • Jeevak Parpia

    Cornell Center for Materials Research, Cornell University

  • Harold Craighead

    Cornell Center for Materials Research, Applied and Engineering Physics, Cornell University, Cornell University, Cornell Univeristy

  • P. L. McEuen

    Laboratory of Atomic and Solid State Physics, Cornell University, Cornell University, LASSP, Cornell University, Cornell Center for Materials Research, Laboratory of Atomic and Solid-State Physics, Cornell University, Center for Nanoscale Systems; Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, 14850, Physics Dept., Cornell University, Ithaca, NY 14853