Gas cluster ion irradiation in formation of nano-ripple structures on silicon surfaces and its applications to producing III-nitride nanorods

ORAL

Abstract

Gas cluster ion beams (GCIB) have been used to fabricate nano-ripple structures on Si substrates. In this work, using (Ar)$_{n}^{+}$ clusters at 30 kV acceleration, where n$\approx $3,000, we have observed nano-ripple formations on the silicon surface after GCIB bombardment. The wavelength, amplitude and the dimensions of the ripples were studied in an effort to characterize the morphology as a function of angle of incidence, crystallographic orientations of the substrate, and the ion dosages. The underlying physics of ripple formation will be discussed and fabrication of nanorods on rippled (111)-Si substrates using III-nitrides, such as GaN, InGaN, and InAlN, will be presented.

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Authors

  • O. Lozano

    Dep. of Physics and TcSUH, University of Houston, TX, Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX., Dept. of Physics and TcSUH,University of Houston, TX

  • X.M. Wang

    Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.

  • Q.Y. Chen

    Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX., Dept. of Physics and TcSUH,University of Houston, TX, Dept. of Phy. and Center for Nanoscience and Nanotechnology, Natl. Sun Yat-Sen U./Dept. of Phy. and Texas Center for Superconductivity, U. of Houston

  • J.R. Liu

    Dep. of Physics and TcSUH, University of Houston, TX, Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.

  • P.V. Chinta

    Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.

  • P.V. Wadekar

    Dep. of Physics and TcSUH, University of Houston, TX, Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX., Dept. of Physics and TcSUH,University of Houston, TX

  • W.K. Chu

    Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX., Dept. of Physics and Texas Center for Superconductivity, Univ. of Houston

  • H.W. Seo

    Dep. of Physics, University of Arkansas, AR, Department of Physics, University of Arkansas, Little Rock, AR, Dept.of Physics, University of Arkansas,AR, Dept. of Physics, Univ. of Arkansas

  • Li-Wei Tu

    Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan, Dep. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, NSYSU, Taiwan, Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China, Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University NSYSU, Kaohsiung, Taiwan, Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen Univ.

  • Li-Wei Tu

    Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan, Dep. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, NSYSU, Taiwan, Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China, Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University NSYSU, Kaohsiung, Taiwan, Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen Univ.

  • Li-Wei Tu

    Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan, Dep. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, NSYSU, Taiwan, Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China, Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University NSYSU, Kaohsiung, Taiwan, Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen Univ.