Full-Field Microscopy with Synchrotron Radiation

A full-field X-ray microscope has been built at the UNICAT-beamline 34 ID-C at the Advanced Photon Source (APS), working with a Kirkpatrick-Baez mirror (KB) as condenser and a micro-Fresnel-zone plate (FZP) as objective lens. 50~nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. The KB system used as a condenser focuses approximately 63{\%} of the incoming intensity onto the sample spot, matching the aperture of the objective lens. For the latter we have a choice of gold micro-FZP having outer zone widths from 40 to 70~nm. Under these conditions the X-ray microscope provides 50-85~nm resolution and short exposure times due to the high efficiency of the KB-system. A field of view of 20x40 micron$^{2}$ can be imaged within a minute by scanning the condenser optic. First tomography experiments have been performed. We will also discuss other techniques such as cone and in-line phase contrast imaging.