Focus Session: Lithography
FOCUS · W24
Presentations
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Nanoimprint Lithography: Process Induced Stresses and Pattern Stability
COFFEE_KLATCH · Invited
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Authors
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Christopher L. Soles
NIST, NIST Polymers Division
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Nanometer-scale control of the crystallization of oligomers and polymers.
COFFEE_KLATCH · Invited
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Authors
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Alain M. Jonas
Universite catholique de Louvain
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UV Polarizer Fabricated by Diblock Copolymer Lithography
ORAL
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Authors
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Koji Asakawa
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Vincent Pelletier
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Mingshaw Wu
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Douglas H. Adamson
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Richard A. Register
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Paul M. Chaikin
Princeton University
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Simple Analytic Model for Nanowire Array Polarizers
ORAL
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Authors
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Vincent Pelletier
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Koji Asakawa
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Mingshaw Wu
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Richard Register
Department of Chemical Engineering, Princeton University, Princeton University
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Paul Chaikin
Princeton University, New York University
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Robust Nanopatterns from Self-Assembly of a Diblock Copolymer and an Inorganic Precursor
ORAL
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Authors
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Ho-Cheol Kim
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Linnea Sundstrom
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Leslie Krupp
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Eugene Delenia
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Charles Rettner
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Martha Sanchez
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Mark Hart
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Ying Zhang
IBM Watson Research Center
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Fabrication of inorganic photonic crystals from interference lithography
ORAL
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Authors
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Jun Hyuk Moon
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Shu Yang
Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104
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Effects on Low Voltage Electron Beam Lithography
ORAL
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Authors
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Mehdi Bolorizadeh
EM Facility, University of Tennessee
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David C. Joy
Oak Ridge National Laboratory
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Hierarchical Organization of Nanoparticle Composites through Nano-Imprinting
ORAL
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Authors
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Azar Alizadeh
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Chris Keimel
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Kenneth Conway
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Andrea Peters
GE Global Research, Niskayuna, NY 12309
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Mesoscale Simulation of the Lithography Process
ORAL
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Authors
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Grant Willson
The University of Texas
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Gerard Schmid
Molecular Imprints, Inc Austin, Texas
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Jason Meiring
The University of Texas
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New Directions in 3-D Multiphoton Lithography.
ORAL
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Authors
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John Fourkas
University of Maryland College Park
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Christopher LaFratta
University of Maryland
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Richard Farrer
Pine Manor College
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Linjie Li
University of Maryland
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Michael Naughton
Boston College, Dept. of Physics, Boston College
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High efficient LEDs having columnar structure surface fabricated by block copolymer lithography
ORAL
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Authors
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Akira Fujimoto
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Koji Asakawa
Corporate Research and Development Center, Toshiba Corporation
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