Study of Nanopore Sculpting with Noble Gas Ion Beams at Various Energies

POSTER

Abstract

We report on experiments using noble gas beams: Helium, Neon, Argon, Krypton, and Xenon, at energies of 1keV, 3keV, and 5keV to controllably fabricate nanopores in freestanding silicon nitride membranes. Utilizing computer simulations (SRIM and TRIM), and a surface adatom diffusion model to describe the phenomenon of nanopore formation, we evaluate the conditions, specifically the ion energy, responsible for highly controllable fabrication of solid state nanopores. Additionally, we present methods to determine the thickness of the grown film as well as the thickness profile of the nanopore.

Authors

  • Bradley Ledden

    University of Arkansas

  • Eric Krueger

  • Jiali Li

    Physics Department University of Arkansas Fayetteville, Arkansas 72701, Physics Department, University of Arkansas, University of Arkansas, Physics Department, University of Arkansas, Fayetteville, AR72701