Scaling behavior of Film growth mechanism

Experimental evidence has accumulated that a strained film can grow stably on a vicinal surface. Linear perturbation analysis of the step-flow regime results in a dispersion relation which determines the persistence of the step-flow growth. The dispersion relation can also be used to probe the system parameters. Investigating the growth dynamics in the step-bunching regime, we found that there is a critical film thickness above which step-bunching occurs. The critical thickness shows a scaling behavior depending on the terrace width and the deposition flux. Experiments show a qualitative agreement with the theory. Our results may open a way to grow films in a desired way.