\textit{In situ} Optical Monitoring and Modeling of Vertically-Aligned Carbon Nanotube Array Growth During Chemical Vapor Deposition

A detailed experimental study of vertically aligned carbon nanotube array (VANTAs) growth by chemical vapor deposition (CVD) based on time-resolved reflectivity and direct remote microscope imaging as a diagnostic to measure and control the length of VANTAs \textit{in situ} was performed. The VANTA growth was investigated between 500 \r{ }C and 900 \r{ }C on Si substrates with different evaporated multilayer catalysts and different feedstock gases. Nanotube lengths were controlled by rapid evacuation of the chamber. A kinetic model was developed to explain the observed growth kinetics, to discuss the main processes responsible for the growth of VANTAs, and to predict optimal growth conditions for single-wall carbon nanotube (SWNT) arrays. High quality VANTAs containing SWNTs were synthesized and characterized using Raman Spectroscopy.