Impedance matching using superconducting planar spiral inductors

We discuss the use of superconducting Nb inductors for impedance matching. The micro-fabricated inductors we used in our experiments had submicron line-widths with 50 to 200 turns. We first characterized these inductors by measuring their inductances, quality factors and self resonance frequencies. Then we compared these results with existing models. With the measured parameters, we showed that these inductors could be used for matching impedances on the order of megaohms to 50 $\Omega $.