Toward Three-Dimensional MEMS Fabricated by Multiphoton Absorption Polymerization

The use of multiphoton absorption polymerization (MAP) to produce three-dimensional structures with sub-micrometer resolution has garnered attention recently. While many of these polymeric systems are quite impressive, the functionality of a purely polymeric structure is quite limited. We have developed a method by which metal can be deposited selectively onto an acrylic polymer structure that has been fabricated \textit{via} MAP. Postpolymerization chemical modification of the polymer provides moieties that have the ability to reduce metal ions or bind metal ions and/or metal nanoparticles. Additional electroless enhancement of the metal produces a conductive structure. This method provides a means to produce three-dimensional micro-electro-mechanical systems by way of MAP.