LXCat Workshop: Data Needs for Industrial Reactors
COFFEE_KLATCH
Abstract
LXCat is a community-based project for storing, sharing, and evaluating data needed to model non-equilibrium low-temperature plasmas. This workshop aims to foster discussions around what type of data (or even experiments) are needed for validating plasma models aimed at modelling reactors and processes relevant to industrial applications.
The following topics will be discussed at this workshop:
12:30: “Introduction to the Workshop”, Emile Carbone, Institut National de la Recherche Scientifique, Canada
12:35 “Data needs of ASML from plasma science”, Dr. Efe Kemaneci, ASML, The Netherlands
12:55 “Tacit Translation: From empirical art to predictive science in plasma processing”, Dr. James Ellis, Oxford instruments, UK
13:15-13:30 “Data for modelling plasma reactors relevant to industrial applications: the LXCat project and beyond”, Emile Carbone, on behalf of the LXCat team
The following topics will be discussed at this workshop:
12:30: “Introduction to the Workshop”, Emile Carbone, Institut National de la Recherche Scientifique, Canada
12:35 “Data needs of ASML from plasma science”, Dr. Efe Kemaneci, ASML, The Netherlands
12:55 “Tacit Translation: From empirical art to predictive science in plasma processing”, Dr. James Ellis, Oxford instruments, UK
13:15-13:30 “Data for modelling plasma reactors relevant to industrial applications: the LXCat project and beyond”, Emile Carbone, on behalf of the LXCat team
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