Plasma Deposition

Presentations

• Investigation of stagnation point flow in an inductively coupled plasma for improved deposition processes

  ORAL

  Oct. 16, 2025, 4:00 PM – Oct. 16, 2025, 4:15 PM

  Publication: [1] H. Kim and I.-K. Oh, Jpn. J. Appl. Phys. 53, 03DA01 (2014).<br>[2] S.(조상현) Jo and H.J.(김호준) Kim, Physics of Fluids 37, 013634 (2025).

  Presenters

  • Chan Yeong Jeong

    Hanyang university

  Authors

  • Chan Yeong Jeong

    Hanyang university

  • Sanghyun Jo

    Hanyang university

  • Ho Jun Kim

    Hanyang university

  View abstract →

• Study of Gas Phase Chemistry in Chemical Vapor Deposition Microwave Plasma Reactors for Diamond Growth

  ORAL

  Oct. 16, 2025, 4:15 PM – Oct. 16, 2025, 4:30 PM

  Presenters

  • Igor D Kaganovich

    Princeton Plasma Physics Laboratory (PPPL)

  Authors

  • Mikhail Mokrov

    Princeton Plasma Physics Laboratory

  • Igor D Kaganovich

    Princeton Plasma Physics Laboratory (PPPL)

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• Hybrid simulation of RF CCPs and their interaction with surface

  ORAL · Invited

  Oct. 16, 2025, 4:30 PM – Oct. 16, 2025, 5:00 PM

  Presenters

  • Yuanhong Song

    School of Physics, Dalian University of Technology, Dalian, China, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  Authors

  • Yuanhong Song

    School of Physics, Dalian University of Technology, Dalian, China, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

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• Evaluation of deposition charactristics of hydrogenated amorphous carbon films using cumene plasma chemical vapor deposition

  ORAL

  Oct. 16, 2025, 5:00 PM – Oct. 16, 2025, 5:15 PM

  Publication: S. Ono et al., Deamond and Related Materials, 157 (2025), 112468.

  Presenters

  • Kazunori Koga

    Kyushu University

  Authors

  • Kazunori Koga

    Kyushu University

  • Shinjiro Ono

    Kyushu University

  • Takamasa Okumura

    Kyushu University

  • Kunihiro Kamataki

    Kyushu University

  • Attri Pankaj

    Kyushu University

  • Masaharu Shiratani

    Kyushu University

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• Influence of hydrogen addition on carbon growth &amp; morphology in microwave plasma driven pyrolysis of methane

  ORAL

  Oct. 16, 2025, 5:15 PM – Oct. 16, 2025, 5:30 PM

  Presenters

  • Xiaoyu Wang

    Maastricht University

  Authors

  • Xiaoyu Wang

    Maastricht University

  • Martijn Ruijzendaal

    Maastricht University

  • M.L. Azevedo

    Maastricht University

  • Gerard van Rooij

    Maastricht University

  • Dirk van den Bekerom

    TNO

  View abstract →