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Capacitively Coupled Plasmas III

ORAL · IR3 · ID: 3430013

Presentations

  • Discussion on energetic electron–sheath interactions and collisionless heating in low-pressure capacitively coupled plasmas

    ORAL

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    Publication: A portion of the content presented in this abstract has been submitted as a manuscript to Plasma Sources Science and Technology (Manuscript Reference: PSST-107055).

    Presenters

    • Jianxiong Yao

      Beijing Institute of Technology

    Authors

    • Jianxiong Yao

      Beijing Institute of Technology

    • Bocong Zheng

      Beijing Institute of Technology

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  • Simulation of standing wave effects in large-area capacitively coupled silane mixture discharges

    ORAL

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    Presenters

    • Yi-Fan Zhang

      Dalian University of Technology

    Authors

    • Yi-Fan Zhang

      Dalian University of Technology

    • Wan Dong

      Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

    • Liuqin Song

      Dalian University of Technology

    • Wenzhu Jia

      Southwest University

    • Julian Schulze

      Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Yuanhong Song

      School of Physics, Dalian University of Technology, Dalian, China, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

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  • Electron dynamics of power absorption in capacitive radio-frequency CF<sub>4</sub> plasmas operating in the striation mode

    ORAL

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    Publication: planned papers

    Presenters

    • Zhenhua Zhou

      Tsinghua University

    Authors

    • Zhenhua Zhou

      Tsinghua University

    • Xiaokun Wang

      Ruhr University Bochum

    • Dong Yang

      Tsinghua University

    • Hanyang Li

      Tsinghua University

    • Wenjin Zhang

      Tsinghua University

    • Julian Schulze

      Ruhr University Bochum

    • Peter Hartmann

      Wigner Research Center for Physics

    • Zoltan Donko

      HUN-REN Wigner Research Centre for Physics, Budapest, Hungary, Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics, Wigner Research Center for Physics

    • Yong-Xin Liu

      Dalian University of Technology

    • Yangyang Fu

      Tsinghua University

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  • Benchmark for intermediate pressure RF CCP: gap between exp and simulation

    ORAL

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    Publication: [1] Z. Donkó et al., "Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge," Plasma Sources Sci. Technol., vol. 32, no. 6, p. 065002, Jun. 2023, doi: 10.1088/1361-6595/acd6b5.<br>[2] D.-Q. Wen, J. Krek, J. T. Gudmundsson, E. Kawamura, M. A. Lieberman, and J. P. Verboncoeur, "Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition," IEEE Trans. Plasma Sci., vol. 50, no. 9, pp. 2548–2557, Sep. 2022, doi: 10.1109/TPS.2022.3174401.

    Presenters

    • Shu Zhang

      Lpp, Ecole Polytechnique, Advanced Space Propulsion and Energy Laboratory (ASPEL), School of Astronautics, Beihang University, Beijing, 102206, China; Centrale Pekin, Beihang University, Beijing,100191

    Authors

    • Shu Zhang

      Lpp, Ecole Polytechnique, Advanced Space Propulsion and Energy Laboratory (ASPEL), School of Astronautics, Beihang University, Beijing, 102206, China; Centrale Pekin, Beihang University, Beijing,100191

    • Alejandro Alvarez Laguna

      CNRS - Laboratoire de Physique des Plasmas

    • Jean-Paul Booth

      LPP, Ecole Polytechnique, Sorbonne Université, Institut Polytechnique de Paris, CNRS, France

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