Workshop: Combining Plasma Modeling and Artificial Intelligence

Presentations

• Integrated modeling and simulation incorporating machine learning methods: case studies and perspectives on usefulness

  ORAL · Invited

  Oct. 13, 2025, 10:00 AM – Oct. 13, 2025, 10:30 AM

  Presenters

  • Peter L Ventzek

    Tokyo Electron America, Inc.

  Authors

  • Peter L Ventzek

    Tokyo Electron America, Inc.

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• Atomistic Simulation of Reactive Ion Etching using Machine Learning Interatomic Potentials

  ORAL · Invited

  Oct. 13, 2025, 10:30 AM – Oct. 13, 2025, 11:00 AM

  Publication: ACS Applied Materials & Interfaces, 16, 48457, 2024 and an additional paper currently in preparation.

  Presenters

  • Changho Hong

    Seoul National University

  Authors

  • Changho Hong

    Seoul National University

  • Hyungmin An

    Seoul National University

  • Sangmin Oh

    Seoul National University

  • Seungwu Han

    Seoul National University

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• Quantitative Analysis of Mono-Energetic Ion Flux Control in Atomic Layer Etching via Tailored Waveform Profiles

  ORAL · Invited

  Oct. 13, 2025, 11:00 AM – Oct. 13, 2025, 11:30 AM

  Presenters

  • Hyungseon Song

    Quantemol Ltd

  Authors

  • Hyungseon Song

    Quantemol Ltd

  • Sebastian Mohr

    Quantemol Ltd

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• Bridging Plasma Equipment and Surface Processes: Insights from Simulation and AI

  ORAL · Invited

  Oct. 13, 2025, 11:30 AM – Oct. 13, 2025, 12:00 PM

  Publication: In-Situ Post-Doping Plasma Process during Atomic Layer Deposition of Al-Doped TiO2 for Sub-Nanometer Lattice Ordering and Defect Annihilation<br>Deep neural network-based reduced-order modeling of ion–surface interactions combined with molecular dynamics simulation<br>Computational approach for plasma process optimization combined with deep learning model<br>Atomistic insights on hydrogen plasma treatment for stabilizing High-k/Si interface

  Presenters

  • Byungjo Kim

    Ulsan National Institute of Science and Technology (UNIST), Ulsan National Institute of Science and Technology

  Authors

  • Byungjo Kim

    Ulsan National Institute of Science and Technology (UNIST), Ulsan National Institute of Science and Technology

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• Lunch

  COFFEE_KLATCH

  Oct. 13, 2025, 12:00 PM – Oct. 13, 2025, 1:30 PM

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• Enhancement of the simulation speed of a particle-in-cell method combined with machine learning technology

  ORAL · Invited

  Oct. 13, 2025, 1:30 PM – Oct. 13, 2025, 2:00 PM

  Presenters

  • HaeJune Lee

    Pusan National University

  Authors

  • HaeJune Lee

    Pusan National University

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• Data-driven state and parameter estimation for low temperature plasmas

  ORAL · Invited

  Oct. 13, 2025, 2:00 PM – Oct. 13, 2025, 2:30 PM

  Presenters

  • Kentaro Hara

    Department of Aeronautics and Astronautics, Stanford University, Stanford University

  Authors

  • Kentaro Hara

    Department of Aeronautics and Astronautics, Stanford University, Stanford University

  • Anubhav Dwivedi

    University of Minnesota Twin Cities, Department of Aerospace Engineering and Mechanics, University of Minnesota Twin Cities

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• AI/ML in Fusion research

  ORAL · Invited

  Oct. 13, 2025, 2:30 PM – Oct. 13, 2025, 3:00 PM

  Presenters

  • Andrew Christlieb

    Michigan State University

  Authors

  • Andrew Christlieb

    Michigan State University

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• Coffee

  COFFEE_KLATCH

  Oct. 13, 2025, 3:00 PM – Oct. 13, 2025, 3:30 PM

  View abstract →