Investigating CF4 Conversion via Dielectric Barrier Discharges using Global Models and 2D Plasma Simulations

The conversion of perfluorinated gases such as carbon tetrafluoride (CF4), which are highly stable and have extremely high global warming potentials, poses a significant challenge for plasma-based abatement and gas treatment technologies.

In this work, we investigate the dynamics of CF4 conversion in dielectric barrier discharges (DBDs) at atmospheric pressure by combining global kinetic models with two-dimensional plasma simulations.

The global model provides insights into dominant reaction pathways and product distributions under varying discharge conditions, while the 2D fluid simulations resolve the spatiotemporal evolution of the streamer propagation and local plasma properties. To reflect realistic process conditions, additional gas components such as nitrogen are considered, which influence both CF4 dissociation and intermediate reaction dynamics.

By coupling both modeling approaches, this study offers a comprehensive understanding of the underlying mechanisms and critical parameters controlling CF4 decomposition efficiency. The results support the development of advanced plasma-based strategies for the selective and energy-efficient removal of fluorinated gases.