APS Logo

Inductively Coupled Plasmas

FOCUS · GT3 · ID: 3430027

Presentations

  • Development of a full fluid moment model for inductively coupled plasmas

    ORAL

    –

    Presenters

    • Eva Marinopoulou

      Stanford University

    Authors

    • Eva Marinopoulou

      Stanford University

    • Yusuke Yamashita

      Japan Aerospace Exploration Agency / Institute of Space and Astronautical Science (JAXA/ISAS)

    • Kentaro Hara

      Department of Aeronautics and Astronautics, Stanford University, Stanford University

    View abstract →

  • Inductively Coupled Plasmas Generated Using Non-Sinusoidal Current Waveforms

    ORAL

    –

    Presenters

    • Shahid Rauf

      Applied Materials, Inc.

    Authors

    • Shahid Rauf

      Applied Materials, Inc.

    • Jason Kenney

      Applied Materials, Inc.

    • Tianhong Wang

      Applied Materials, Inc.

    • Dmytro Sydorenko

      Department of Physics, University of Alberta, AB, Canada

    • Alexander V. Khrabrov

      Princeton Plasma Physics Laboratory (PPPL)

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory (PPPL)

    View abstract →

  • Self organization in inductively coupled plasmas

    ORAL · Invited

    –

    Presenters

    • Shaun Smith

      Lam Research Corporation

    Authors

    • Shaun Smith

      Lam Research Corporation

    • Brett Scheiner

      Lam Research

    • Benjamin Yee

      Lam Research Corporation

    • Amanda M Lietz

      North Carolina State University

    • Omar Alsaeed

      North Carolina State University

    View abstract →

  • Controlling the spatial distribution of the electron beam using a grid with spatially varying mesh sizes in inductively coupled plasma.

    ORAL

    –

    Publication: planned papers: Controlling the spatial distribution of the electron beam by the spliced grid in inductively coupled plasma.

    Presenters

    • Jaehwi Kim

      Hanyang University

    Authors

    • Jaehwi Kim

      Hanyang University

    • jiwon jung

      Hanyang University

    • Min-Seok Kim

      Hanyang University

    • Chin-Wook Chung

      Hanyang University, Department of electrical engineering, Hanyang University, Seoul, Korea1

    View abstract →

  • PIC/MCC simulations of the effects of a radio-frequency bias on inductively coupled plasmas

    ORAL

    –

    Publication: submitted manuscripts: Xiandi Li, Zhaoyu Chen, Zili Chen, Yu Wang, Minglun Tian, Hongyu Wang, Zhipeng Chen, Wei Jiang, Julian Schulze, Ya Zhang

    Presenters

    • Xiandi Li

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    Authors

    • Xiandi Li

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Zhaoyu Chen

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Zili Chen

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Yu Wang

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China, Huazhong University of Science and Technology

    • Xiandi Li

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Hongyu Wang

      School of Physics Science and Technology, Anshan Normal University, Anshan, 114007, China

    • Zhipeng Chen

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Li Wang

      Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany, Ruhr University Bochum

    • Wei Jiang

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Julian Schulze

      Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

    • Ya Zhang

      Department of Mathematics, Wuhan University of Technology, Wuhan, 430070, China, Wuhan University of Technology, Department of Physics, Wuhan University of Technology, Wuhan, 430070, China

    View abstract →

  • Simulation of an Inductively Coupled Plasma with a Two-Dimensional Darwin Particle-in-Cell Code

    ORAL

    –

    Publication: Dmytro Sydorenko, Igor D. Kaganovich, Alexander V. Khrabrov, Stephane A. Ethier, Jin Chen, Salomon Janhunen, "Improved algorithm for a two-dimensional Darwin particle-in-cell code", Phys. Plasmas 32, 043904 (2025).

    Presenters

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory (PPPL)

    Authors

    • Dmytro Sydorenko

      Department of Physics, University of Alberta, AB, Canada

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory (PPPL)

    • Alexander V. Khrabrov

      Princeton Plasma Physics Laboratory (PPPL)

    • Stephane Ethier

      Princeton Plasma Physics Laboratory, Princeton, USA

    • Jin Chen

      Princeton Plasma Physics Laboratory

    • Salomon Janhunen

      Los Alamos National Laboratory

    View abstract →

  • Investigation of E-H Mode Transition in Inductively Coupled Plasmas Using a Two-Dimensional PIC/MCC Method

    ORAL

    –

    Publication: Simulations of E-H Mode Transition in Inductively Coupled Plasmas via 2D Particle-In-Cell/Monte Carlo Collision method

    Presenters

    • Zhaoyu Chen

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    Authors

    • Zhaoyu Chen

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Zili Chen

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Yu Wang

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China, Huazhong University of Science and Technology

    • Wei Jiang

      School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Yonghua Ding

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Donghui Xia

      School of Electrical and Electronic Engineering, Huazhong University of Science and Technology, Wuhan, 430074, China

    • Ya Zhang

      Department of Mathematics, Wuhan University of Technology, Wuhan, 430070, China, Wuhan University of Technology, Department of Physics, Wuhan University of Technology, Wuhan, 430070, China

    View abstract →