Capacitively Coupled Plasmas II

Presentations

• Different methods for improving uniformity of very high frequency capacitively coupled discharges

  ORAL

  Oct. 16, 2025, 9:00 AM – Oct. 16, 2025, 9:15 AM

  Presenters

  • Denis Eremin

    Ruhr University Bochum

  Authors

  • Denis Eremin

    Ruhr University Bochum

  • Yulia Sharova

    Ruhr University Bochum

  • Liang Xu

    Soochow University

  • Masaaki Matsukuma

    Tokyo Electron Technology Solutions Limited

  • Thomas Mussenbrock

    Ruhr-Universität Bochum

  • Ralf Peter Brinkmann

    Ruhr University Bochum

  View abstract →

• Electron dynamics and particle transport in capacitively coupled Ar/O₂ discharges driven by sawtooth up voltage waveform

  ORAL

  Oct. 16, 2025, 9:15 AM – Oct. 16, 2025, 9:30 AM

  Publication: Wan Dong et al 2025 Plasma Sources Sci. Technol. 34 025008

  Presenters

  • Wan Dong

    Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  Authors

  • Wan Dong

    Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Zhuo-Yao Gao

    Dalian University of Technology

  • Li Wang

    Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany, Ruhr University Bochum

  • Zhuo-Yao Gao

    Dalian University of Technology

  • Zhuo-Yao Gao

    Dalian University of Technology

  • Yong-Xin Liu

    Dalian University of Technology

  • Yuanhong Song

    School of Physics, Dalian University of Technology, Dalian, China, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Julian Schulze

    Ruhr University Bochum

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• ­­­­­Simulation benchmarks of the PIC-MCC codes XPDP1 and VSim for helium capacitively coupled plasma discharges with spatiotemporal analysis

  ORAL

  Oct. 16, 2025, 9:30 AM – Oct. 16, 2025, 9:45 AM

  Presenters

  • Kaviya Aranganadin

    Hanyang University

  Authors

  • Kaviya Aranganadin

    Hanyang University

  • Guo-Ning Wang

    Hanyang University

  • Hua-Yi Hsu

    National Taipei University of Technology

  • John P. Verboncoeur

    Michigan State University

  • Ming-Chieh Lin

    Hanyang University

  View abstract →

• On electron power absorption in low pressure electronegative capacitive discharges

  ORAL

  Oct. 16, 2025, 9:45 AM – Oct. 16, 2025, 10:00 AM

  Presenters

  • Jon Tomas Gudmundsson

    University of Iceland

  Authors

  • Jon Tomas Gudmundsson

    University of Iceland

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• Scaling of Capacitively Coupled Plasmas Properties up to 10s of kV Driving Voltages

  ORAL

  Oct. 16, 2025, 10:00 AM – Oct. 16, 2025, 10:15 AM

  Presenters

  • Andrew Tasman Powis

    Princeton Plasma Physics Laboratory, Princeton, USA

  Authors

  • Andrew Tasman Powis

    Princeton Plasma Physics Laboratory, Princeton, USA

  • Sarveshwar Sharma

    Institute for Plasma Research

  • Alexander V. Khrabrov

    Princeton Plasma Physics Laboratory (PPPL)

  • Igor D Kaganovich

    Princeton Plasma Physics Laboratory (PPPL)

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• Ion energy distribution transitions from multimodal to quasi-single-peak in capacitive discharges driven by tailored voltage waveforms

  ORAL

  Oct. 16, 2025, 10:15 AM – Oct. 16, 2025, 10:30 AM

  Presenters

  • Deqi Wen

    Dalian University of Technology

  Authors

  • Chan Feng

    Dalian University of Technology

  • Deqi Wen

    Dalian University of Technology

  • Jon Tomas Gudmundsson

    University of Iceland

  • John P. Verboncoeur

    Michigan State University

  • Julian Schulze

    Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

  • Younian Wang

    Dalian University of Technology, Dalian university of technology

  View abstract →