Systematic validation of simulated atomic oxygen densities in He/O₂ micro-scaled atmospheric pressure plasma jets

Reactive species such as atomic oxygen are promising for applications in biomedicine and surface processing. In this work, atomic oxygen densities simulated using a plug-flow model are validated against 174 measurement data points from multiple publications in several similar parallel plate radio frequency driven He/O₂ micro-scaled atmospheric pressure plasma jets (μAPPJs). These data points encompass variations of the absorbed power, He gas flow rate and O₂ mixture ratio. Good agreement is obtained between the simulation results and most of the TALIF measurements. The percentage error distribution is used to quantify the model prediction accuracy relative to a selection of these TALIF data. An approximately normal distribution is shown, and the mean is close to 0. The mean value is affected by removing the dominant atomic oxygen gain and loss reaction channels. The quantitative influence of these channels on the model prediction accuracy provides some guidance of improving the accuracy of the chemical kinetics, based on the systematic comparison of the simulation results with a large number of well-characterized measurement data.