Plasma Diagnostics III

Presentations

• In-line in situ sensing of OH radicals from a remote plasma source using Faraday rotation spectroscopy

  ORAL

  Oct. 16, 2025, 11:00 AM – Oct. 16, 2025, 11:15 AM

  Presenters

  • Timothy Y Chen

    Applied Materials, Inc.

  Authors

  • Timothy Y Chen

    Applied Materials, Inc.

  • Brian Alvarez

    Applied Materials, Inc.

  • Kelvin Chan

    Applied Materials

  • Dmitry A Dzilno

    Applied Materials, Inc.

  View abstract →

• Overcoming challenges in laser-induced fluorescence for diagnostics of atomizers for trace element analysis

  ORAL · Invited

  Oct. 16, 2025, 11:15 AM – Oct. 16, 2025, 11:45 AM

  Publication: Mrkvičková M. et al., Combustion and Flame 241 (2022), 112100.<br>Dvořák P. et al., Front. Phys. 12 (2024), 1408078. <br>Dvořák, P. et al., J Fluoresc (2025).<br><br>

  Presenters

  • Martina Mrkvičková

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  Authors

  • Martina Mrkvičková

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Pavel Dvořák

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Tomáš Medek

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Michal Pazderka

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Waseem Khan

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Nima Bolouki

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Adam Obrusník

    Department of Plasma Physics and Technology, Masaryk University, Brno, Czechia

  • Milan Svoboda

    Institute of Analytical Chemistry of the Czech Academy of Sciences, Brno, Czechia

  • Jiří Dědina

    Institute of Analytical Chemistry of the Czech Academy of Sciences, Brno, Czechia

  • Jan Kratzer

    Institute of Analytical Chemistry of the Czech Academy of Sciences, Brno, Czechia

  View abstract →

• Analysis of the Transmission Spectrum of the Ceramic-Shielded Cutoff Probe in Low-Pressure Plasma

  ORAL

  Oct. 16, 2025, 11:45 AM – Oct. 16, 2025, 12:00 PM

  Publication: D.Y. Hwang, H.J. Yeom, G. Lee, J.H. Kim, and H.C. Lee, "Transmission spectrum analysis of ceramic-shielded microwave cutoff probes in low-pressure plasmas," J. Appl. Phys. 135(22), (2024); doi: 10.1063/5.0214696

  Presenters

  • Do-Yeon Hwang

    Korea Research Institute of Standards and Science

  Authors

  • Do-Yeon Hwang

    Korea Research Institute of Standards and Science

  • Hee-Jung Yeom

    Korea Research Institute of Standards and Science

  • Wooram Kim

    Korea Research Institute of Standards and Science

  • Gawon Lee Lee

    Chungnam National University

  • Jung-Hyung Kim

    Korea Research Institute of Standards and Science

  • Hyo-Chang Lee

    Korea Aerospace University

  View abstract →

• Measurement of plasma electron density using a non-invasive microwave resonance spectroscopy through a chamber window in a low-pressure plasma

  ORAL

  Oct. 16, 2025, 12:00 PM – Oct. 16, 2025, 12:15 PM

  Presenters

  • InYong Park

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  Authors

  • InYong Park

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • SangHo Lee

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • GeonWoong Eom

    Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • WooSeok Kang

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • Min Hur

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • DaeWoong Kim

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  View abstract →

• Development of Microwave Patch Antenna Sensor for Plasma Uniformity Monitorin

  ORAL

  Oct. 16, 2025, 12:15 PM – Oct. 16, 2025, 12:30 PM

  Presenters

  • Gwang-Seok Chae

    Korea Aerospace University

  Authors

  • Gwang-Seok Chae

    Korea Aerospace University

  • Min Young Yoon

    Korea Aerospace University

  • Hee-Jung Yeom

    Korea Research Institute of Standards and Science

  • Eun-Seok Choe

    Korea Research Institute of Standards and Science

  • Jung-Hyung Kim

    Korea Research Institute of Standards and Science

  • Hyo-Chang Lee

    Korea Aerospace University

  View abstract →