Research on Reference Data Set for Interactions Between Electrons and Atmospheric Gas Molecules

To support modeling and diagnostics in the fields of low-temperature plasma and nuclear fusion, we have been conducting an international collaborative research project since 2013 to construct a reference data set for electron collisions with atmospheric gas molecules. This project is led by a group of globally recognized experts in theoretical and experimental research, and aims to provide reliable cross section data through systematic selection, analysis, and evaluation of scientifically and industrially important molecules._₄) and acetylene (C_₂H_₂). In 2019, the scope was expanded to include nitrogen oxides (N_xO_y) and nitrogen trifluoride (NF_₃), which are important in both atmospheric chemistry and semiconductor processing. Subsequently, validated data sets were published for water vapor (H_₂O) in 2021, molecular nitrogen (N_₂) in 2023, and carbon dioxide (CO_₂) in 2024. As of 2025, we are working toward completing the data set for molecular oxygen (O_₂).

This presentation introduces the published data sets and describes the methodologies used for molecule selection, data evaluation, and validation. The resulting electron collision cross section data are expected to serve as foundational resources for establishing international standards in plasma modeling, and for advancing applications in fusion energy, environmental plasma processes, and next-generation manufacturing technologies.