effect of non-maxwellian electron energy distributions on the collisional-radiative model of argon inductively coupled plasmas

the collisional-radiative (CR) model is a numerical modeling approach used to determine plasma parameters such as electron density and electron temperature by analyzing the intensity of emitted light from plasmas. previous studies on CR modeling typically assumed a maxwellian or ideal non-maxwellian electron energy distribution function (EEDF). however, low-temperature plasmas commonly exhibit non-maxwellian EEDFs with the depletion of high-energy electrons, that means conventional CR modeling may not accurately reflect the actual plasma. in this study, we calculate key spectral line intensities of argon inductively coupled plasma using a CR model based on experimentally measured EEDFs obtained through a langmuir probe. to compensate depopulation of high-energy electron group, we developed effective EEDF that includes depletion of high energy electrons. a comparative analysis is conducted between the results derived from depleted theoretical maxwellian EEDFs and those obtained using the experimentally measured distributions. a substantial enhancement in model accuracy was observed when using depleted maxwellian distribution, as compared to the general maxwellian distribution.