Pulsed Inductively Coupled Plasmas: plasmas parameters and sheath thickness

Pulsed plasmas discharges were diagnosed with microsecond time resolution using a Fourier cutoff probe to measure time dependent absolute electron density, electron temperature, and sheath thickness. The decay of electron density during the power-off phase was analyzed based on the electron energy distribution function, considering electron-neutral collisions and diffusion. Electron temperatures near room temperature were observed at approximately 2.5 ms after the power-off phase, and temporal variations in sheath thickness were characterized as a function of discharge conditions. These results support a better understanding of pulsed plasmas discharges and provide reliable benchmark data for simulation validation.