Plasma Semiconductor Applications

Presentations

• The effect of cryogenic substrate cooling on electron energy distribution in inductively coupled plasma

  ORAL

  Oct. 14, 2025, 9:00 AM – Oct. 14, 2025, 9:15 AM

  Presenters

  • JONGHA AHN

    Department of Electrical Engineering, Hanyang University

  Authors

  • JONGHA AHN

    Department of Electrical Engineering, Hanyang University

  • Deok-Hwan Kim

    Hanyang university, Department of Electrical Engineering, Hanyang University, Department of electrical engineering, Hanyang University, Seoul, Korea

  • Chin-Wook Chung

    Hanyang University, Department of electrical engineering, Hanyang University, Seoul, Korea1

  View abstract →

• Development of a Transformer-Coupled Plasma Source with Enhanced Radical Delivery and Plasma Ignition for Next-Generation Plasma Processing

  ORAL

  Oct. 14, 2025, 9:15 AM – Oct. 14, 2025, 9:30 AM

  Presenters

  • Jaehoon Choi

    Wonik IPS

  Authors

  • Jaehoon Choi

    Wonik IPS

  • Tae S Cho

    Wonik IPS

  View abstract →

• Development of a High-Pressure Compatible Self Plasma-Optical Emission Spectrometer for Real-Time Plasma Process Monitoring

  ORAL

  Oct. 14, 2025, 9:30 AM – Oct. 14, 2025, 9:45 AM

  Presenters

  • Geon Woong Eom

    Korea Institute of Machinery and Materials

  Authors

  • Geon Woong Eom

    Korea Institute of Machinery and Materials

  • SangHo Lee

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • InYong Park

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • WooSeok Kang

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • Min Hur

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

  • DaeWoong Kim

    Korea Institute of Machinery and Materials, Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials

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• Tunable antenna array for large area microwave plasma source for semiconductor manufacturing

  ORAL

  Oct. 14, 2025, 9:45 AM – Oct. 14, 2025, 10:00 AM

  Presenters

  • Giwon Shin

    Wonik IPS

  Authors

  • Giwon Shin

    Wonik IPS

  • Jaehoon Choi

    Wonik IPS

  • Sooyoung Hwang

    Wonik IPS

  • Jeonghun Kim

    Wonik IPS

  • Hakmin Kim

    Wonik IPS

  • Minhee Lee

    Wonik IPS

  • Tae S Cho

    Wonik IPS

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• Beamline pressure effect on ion beam transport in ion implanters

  ORAL · Invited

  Oct. 14, 2025, 10:00 AM – Oct. 14, 2025, 10:30 AM

  Presenters

  • John (Bon-Woong) Koo

    Applied Materials

  Authors

  • John (Bon-Woong) Koo

    Applied Materials

  • Frank Sinclair

    Applied Materials

  • Paul Murphy

    Applied Materials

  View abstract →