APS Logo

Magnetically-Enhanced Plasmas: Magnetron

FOCUS · HW4 · ID: 1531236





Presentations

  • Different mechanisms of electron energization in spokes observed in ExB plasmas

    ORAL

    Presenters

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    Authors

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    • Liang Xu

      Soochow University

    • Lukas Vogelhuber

      Ruhr University Bochum

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    View abstract →

  • Thermodynamic quasi-equilibria in high power magnetron discharges: A generalized Poisson-Boltzmann relation

    ORAL

    Publication: 1. Köhn K., Krüger D., Kemaneci E., Xu L., Eremin D., Brinkmann R.P., Plasma Sources Sci. Technol. 30, 105014 (2021)<br>2. Köhn K., Krüger D., Xu L., Eremin D., Brinkmann R.P., Plasma Sources Sci. Technol. 32, 055012 (2021)<br>

    Presenters

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    Authors

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Liang Xu

      Soochow University

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    View abstract →

  • Spatially resolved model of the discharge current characteristics of axisymmetric radio frequency-driven magnetrons

    ORAL

    Presenters

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    Authors

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Lukas Vogelhuber

      Ruhr University Bochum

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Liang Xu

      Soochow University

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    View abstract →

  • Gradient drift instabilities and rotating spokes in direct current and radio frequency driven magnetron discharges

    ORAL · Invited

    Publication: [1] L. Xu, D. Eremin, and R. P. Brinkmann, Plasma Sources Science and Technology 30, 075013 (2021).<br>[2] L. Xu, D. Eremin, A. Smolyakov, D. Krüger, K. Köhn, and R. P. Brinkmann, arXiv: 2202.07033 (2022).<br>[2] L. Xu, H. M. Sun, D. Eremin, S. Ganta, I. Kaganovich, K. Bera, and S. Rauf, arXiv:2305.15941 (2023).

    Presenters

    • Liang Xu

      Soochow University, China

    Authors

    • Liang Xu

      Soochow University, China

    • Denis Eremin

      Ruhr Univ Bochum, Ruhr University Bochum

    • Andrei Smolyakov

      Univ Saskatchewan

    • Haoming Sun

      École Polytechnique fédérale de Lausanne (EPFL), Swiss Plasma Center (SPC), Switzerland

    • Dennis Krueger

      Ruhr Univ Bochum, Ruhr University Bochum

    • Kevin Koehn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    • Sathya S Ganta

      Applied Materials, Inc., Applied Materials Inc, Applied Materials

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory

    • Kallol Bera

      Applied Materials, Inc., Applied Materials

    • Shahid Rauf

      Applied Materials, Inc., Applied Materials

    View abstract →