Inductively Coupled Plasmas

Presentations

• Characterization of fundamental plasma parameters in a double inductively coupled plasma: simulation and experiment

  ORAL

  Oct. 12, 2023, 10:00 AM – Oct. 12, 2023, 10:15 AM

  Presenters

  • Katharina Noesges

    Ruhr University Bochum, 44780 Bochum, Germany

  Authors

  • Katharina Noesges

    Ruhr University Bochum, 44780 Bochum, Germany

  • Jonathan Jenderny

    Ruhr University Bochum, 44780 Bochum, Germany

  • Henrik Hylla

    Ruhr University Bochum, 44780 Bochum, Germany

  • Dominik Filla

    Ruhr University Bochum, 44780 Bochum, Germany

  • Ihor Korolov

    Ruhr University Bochum, 44780 Bochum, Germany

  • Peter Awakowicz

    Ruhr University Bochum, 44780 Bochum, Germany

  • Andrew R. Gibson

    Ruhr University Bochum, 44780 Bochum, Germany

  • Thomas Mussenbrock

    Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University Bochum

  View abstract →

• Investigations of Pulse-to-Pulse Instabilities and Abnormal Electron Growth in Highly Electronegative Inductively Coupled Plasmas

  ORAL

  Oct. 12, 2023, 10:15 AM – Oct. 12, 2023, 10:30 AM

  Presenters

  • Tugba Piskin

    University of Michigan

  Authors

  • Tugba Piskin

    University of Michigan

  • Evan Litch

    University of Michigan

  • Hyunjae Lee

    Samsung Electronics Co.

  • Sang Ki Nam

    Samsung Electronics Co. Ltd., Mechatronics Research, Samsung Electronics

  • Mark J Kushner

    University of Michigan

  View abstract →

• Modeling of non-equilibrium effects in inductively coupled plasma discharges

  ORAL

  Oct. 12, 2023, 10:30 AM – Oct. 12, 2023, 10:45 AM

  Publication: Kumar, S., Munafò, A., Jo, S. M., and Panesi, M., "Electronic-state-resolved non-equilibrium analysis of ICP discharges," Proc.<br>of the 32th Int. Symposium on Rarefied Gas Dynamics, 2022. Accepted.<br><br>Kumar, S., Munafò, A., Jo, S.M. and Panesi, M., 2023. State-to-State Analysis of a Nitrogen RF Inductively Coupled Plasma. In AIAA SCITECH 2023 Forum (p. 0570).

  Presenters

  • Sanjeev Kumar

    University of Illinois at Urbana-Champaign

  Authors

  • Sanjeev Kumar

    University of Illinois at Urbana-Champaign

  • Alessandro Munafo

    University of Illinois at Urbana-Champaign

  • Sung Min Jo

    Univesity of Illinois at Urbana-Champaign, University of Illinois at Urbana-Champaign

  • Marco Panesi

    University of Illinois at Urbana-Champaign

  View abstract →

• Unraveling the Influence of Non-Maxwellian Electron Energy Distribution on Argon Inductively Coupled Plasma

  ORAL

  Oct. 12, 2023, 10:45 AM – Oct. 12, 2023, 11:00 AM

  Presenters

  • Maryam Khaji

    University of Illinois at Urbana-Champaign

  Authors

  • Maryam Khaji

    University of Illinois at Urbana-Champaign

  • Sanjeev Kumar

    University of Illinois at Urbana-Champaign

  • Alessandro Munafo

    University of Illinois at Urbana-Champaign

  • Alessandro Parente

    Université Libre de Bruxelles

  • Marco Panesi

    University of Illinois at Urbana-Champaign

  View abstract →

• Simulation of Inductively Coupled Plasmas Using a Direct Implicit Darwin 2D Particle-in-Cell Code

  ORAL

  Oct. 12, 2023, 11:00 AM – Oct. 12, 2023, 11:15 AM

  Presenters

  • Dmytro Sydorenko

    University of Alberta, University of Alberta, Edmonton, Alberta T6G 2E1, Canada

  Authors

  • Dmytro Sydorenko

    University of Alberta, University of Alberta, Edmonton, Alberta T6G 2E1, Canada

  • Alexander V Khrabrov

    Princeton Plasma Physics Laboratory

  • Andrew Tasman T Powis

    Princeton Plasma Physics Laboratory

  • Willca Villafana

    Princeton Plasma Physics Laboratory

  • Igor D Kaganovich

    Princeton Plasma Physics Laboratory

  • Sierra Jubin

    Princeton Plasma Physics Laboratory, Princeton University

  • Stephane A Ethier

    Princeton Plasma Physics Laboratory

  View abstract →

• A Plasma-Based Frequency-Selective Limiting Reflectarray

  ORAL

  Oct. 12, 2023, 11:15 AM – Oct. 12, 2023, 11:30 AM

  Presenters

  • Krushna Kanth Varikuntla

    The University of Toledo

  Authors

  • Krushna Kanth Varikuntla

    The University of Toledo

  • Abbas Semnani

    University of Toledo, The University of Toledo

  View abstract →

• Reactive species production within inductively coupled hydrogen plasmas

  ORAL · Invited

  Oct. 12, 2023, 11:30 AM – Oct. 12, 2023, 12:00 PM

  Presenters

  • James Dedrick

    York Plasma Institute, University of York, York, YO10 5DD, UK, University of York

  Authors

  • James Dedrick

    York Plasma Institute, University of York, York, YO10 5DD, UK, University of York

  • Gregory J Smith

    University of York

  • Ryan Magee

    University of York

  • Max Kellermann-Stunt

    University of York

  • Kari Niemi

    University of York

  • Chad Beaudette

    Lam Research Corporation

  • Shaun Smith

    Lam Research Corporation

  • Paola Diomede

    Maastricht University

  • Andrew R Gibson

    Ruhr University Bochum, Germany

  • Scott J Doyle

    University of Michigan

  • Vasco Guerra

    Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Portugal, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Instituto Superior Tecnico

  • Mark J Kushner

    University of Michigan

  • James Ellis

    University of York, Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

  • Erik Wagenaars

    York Plasma Institute

  • Gilles Cartry

    Aix-Marseille University

  • Timo Gans

    Dublin City University

  View abstract →