Sheaths and Plasma Boundary Interactions

Presentations

• Multidimensional effects in low-pressure discharges

  ORAL

  Oct. 10, 2023, 1:30 PM – Oct. 10, 2023, 1:45 PM

  Presenters

  • Uwe Czarnetzki

    Ruhr University Bochum, Faculty of Physics and Astronomy, Ruhr-University Bochum, Faculty of Physics and Astronomy

  Authors

  • Uwe Czarnetzki

    Ruhr University Bochum, Faculty of Physics and Astronomy, Ruhr-University Bochum, Faculty of Physics and Astronomy

  • Jonas Thiel

    Ruhr-University Bochum, Faculty of Physics and Astronomy

  • Tsanko V Tsankov

    Ruhr University Bochum, Germany, Ruhr-University Bochum, Faculty of Physics and Astronomy

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• Theory and simulations of cylindrical plasma sheaths

  ORAL

  Oct. 10, 2023, 1:45 PM – Oct. 10, 2023, 2:00 PM

  Presenters

  • Kentaro Hara

    Stanford University, Applied Materials

  Authors

  • Kentaro Hara

    Stanford University, Applied Materials

  • Yusuke Yamashita

    Standford University

  • Shahid Rauf

    Applied Materials, Inc., Applied Materials

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• A semi-analytical RF sheath model for a wide range of excitation waveforms and amplitudes, and levels of collisionality

  ORAL

  Oct. 10, 2023, 2:00 PM – Oct. 10, 2023, 2:15 PM

  Publication: [1] V. A. Godyak and Z. K. Ghanna , Sov. J. Plasma Phys. 6, 372 (1979)<br>[2] M.A. Lieberman, IEEE Trans. Plasma Sci., 16, 638 (1988).<br>[3] M.A. Lieberman, IEEE Trans. Plasma Sci., 17, 338 (1988)<br>[4] R.P. Brinkmann, Plasma Sources Sci. Technol. 25, 014001(2016)<br>[5] M. Klich, S. Wilczek, T. Mussenbrock, R.P. Brinkmann, Plasma Sources Sci. Technol. 10,1316 (2022).

  Presenters

  • Tagra Samir

    Ruhr-Universität Bochum

  Authors

  • Tagra Samir

    Ruhr-Universität Bochum

  • Sebastian Wilczek

    Ruhr-Universität Bochum

  • Maximilian Klich

    Ruhr-Universität Bochum

  • Thomas Mussenbrock

    Ruhr-Universität Bochum

  • Ralf Peter Brinkmann

    Ruhr-Universität Bochum

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• High Order fluid simulation of multicomponent air plasma-sheath formation

  ORAL

  Oct. 10, 2023, 2:15 PM – Oct. 10, 2023, 2:30 PM

  Presenters

  • Giuseppe Matteo Gangemi

    von Karman Institute for Fluid Dynamics, Universitè de Liege

  Authors

  • Giuseppe Matteo Gangemi

    von Karman Institute for Fluid Dynamics, Universitè de Liege

  • Koen Hillewaert

    Université de Liège

  • Thierry Magin

    von Karman Institute for Fluid Dynamics

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• Experimental investigation on how the ion-neutral collisions modify the ion flux at the sheath in low temperature plasmas

  ORAL · Invited

  Oct. 10, 2023, 2:30 PM – Oct. 10, 2023, 3:00 PM

  Presenters

  • Young-chul Ghim

    Department of Nuclear and Quantum Engineering, KAIST, KAIST

  Authors

  • Young-chul Ghim

    Department of Nuclear and Quantum Engineering, KAIST, KAIST

  • Yegeon Lim

    Department of Nuclear and Quantum Engineering, KAIST, Daejeon, S. Korea

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• Investigation of ion collision effect on electrostatic plasma-sheath transition in weakly ionized and weakly collisional discharge

  ORAL

  Oct. 10, 2023, 3:00 PM – Oct. 10, 2023, 3:15 PM

  Publication: [1] K.-U. Riemann, Physics of plasmas 4, 4158 (1997)<br>[2] H. Lee, et. al., Plasma Sources Science and Technology 31, 084006 (2022)

  Presenters

  • Haneul Lee

    Seoul National University

  Authors

  • Haneul Lee

    Seoul National University

  • Nam-Kyun Kim

    Samsung Electronics Co., Ltd.

  • Myeong-Geon Lee

    Seoul National University

  • Ji-Won Kwon

    Seoul Nat'l Univ., Seoul National University

  • Sung Hyun Son

    Seoul National University

  • Namjae Bae

    Seoul National University

  • Taejun Park

    Seoul National University

  • Seolhye Park

    Samsung Display Co., Ltd.

  • Gon-Ho Kim

    Seoul Nat'l Univ., Seoul National University

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