Modeling & Simulation IV: Low Pressure Plasma Sources

Presentations

• Plasma Modeling and Diagnostics in Semiconductor Equipment Design

  ORAL · Invited

  Oct. 12, 2023, 10:00 AM – Oct. 12, 2023, 10:30 AM

  Presenters

  • Saravanapriyan Sriraman

    Lam Research

  Authors

  • Saravanapriyan Sriraman

    Lam Research

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• Effect of Electron Energy Distribution Functions on Plasma Behavior in Moderate-Pressure RF Capacitively Coupled Plasmas

  ORAL

  Oct. 12, 2023, 10:30 AM – Oct. 12, 2023, 10:45 AM

  Presenters

  • Kallol Bera

    Applied Materials, Inc., Applied Materials

  Authors

  • Kallol Bera

    Applied Materials, Inc., Applied Materials

  • Rupali Sahu

    Applied Materials, Inc.

  • Nakul Nuwal

    Applied Materials, Inc., Applied Materials

  • Abhishek Verma

    Applied Materials, Applied Materials, Inc.

  • Shahid Rauf

    Applied Materials, Inc., Applied Materials

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• Evaluating power deposition in Inductively Coupled Plasma systems using the particle-in-cell code VSim

  ORAL

  Oct. 12, 2023, 10:45 AM – Oct. 12, 2023, 11:00 AM

  Presenters

  • Eve Lanham

    Tech-X Corp

  Authors

  • Eve Lanham

    Tech-X Corp

  • Daniel S Main

    Tech-X Corporation, Tech-X Corp

  • John R Cary

    University of Colorado, Boulder

  • Thomas G Jenkins

    Tech-X Corporation

  • Jarrod Leddy

    Tech-X Corp

  • Scott E Kruger

    Tech-X Corp

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• 3D effects in the simulations of the magnetized DC plasma sources for ion implantation.

  ORAL

  Oct. 12, 2023, 11:00 AM – Oct. 12, 2023, 11:15 AM

  Presenters

  • Alexandre Likhanskii

    Applied Materials

  Authors

  • Alexandre Likhanskii

    Applied Materials

  • Andrei Smolyakov

    Univ Saskatchewan

  • Mina Papahn Zadeh

    Univ of Saskatchewan

  • Nirbhav S Chopra

    Princeton Plasma Physics Laboratory

  • Yevgeny Raitses

    Princeton Plasma Physics Laboratory

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• Improved Closure Models for Fluid Moment Modeling of Capacitively Coupled Plasmas

  ORAL

  Oct. 12, 2023, 11:15 AM – Oct. 12, 2023, 11:30 AM

  Presenters

  • Adnan Mansour

    Stanford University

  Authors

  • Adnan Mansour

    Stanford University

  • Alejandro Alvarez Laguna

    Laboratoire de Physique des Plasmas, CNRS, E. Polytechnique, LPP-CNRS, Stanford University, Laboratoire de Physique des Plasmas, Ecole Polytechnique, CNRS

  • Kentaro Hara

    Stanford University, Applied Materials

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• Simulations of EUV Induced Hydrogen Plasmas and In-Situ Tin Cleaning

  ORAL

  Oct. 12, 2023, 11:30 AM – Oct. 12, 2023, 11:45 AM

  Presenters

  • Tugba Piskin

    University of Michigan

  Authors

  • Tugba Piskin

    University of Michigan

  • Vladimir Volynets

    Samsung Electronics Co., Ltd.

  • Sang Ki Nam

    Samsung Electronics Co. Ltd., Mechatronics Research, Samsung Electronics

  • Hyunjae Lee

    Samsung Electronics Co.

  • Mark J Kushner

    University of Michigan

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• Atomic structure considerations for the low-temperature opacity of Xenon

  ORAL

  Oct. 12, 2023, 11:45 AM – Oct. 12, 2023, 12:00 PM

  Presenters

  • Amanda Neukirch

    Los Alamos National Laboratory, LANL

  Authors

  • Amanda Neukirch

    Los Alamos National Laboratory, LANL

  • James Colgan

    LANL

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