Plasma Semiconductor & RF Applications

Presentations

• Reactor-feature coupled model to extend Cu fill in BEOL using PVD

  ORAL

  Oct. 12, 2023, 1:30 PM – Oct. 12, 2023, 1:45 PM

  Presenters

  • Parnika Agrawal

    Applied Materials

  Authors

  • Parnika Agrawal

    Applied Materials

  • Prashanth Kothnur

    Applied Materials

  • Yida Lin

    Applied Materials

  • ShaoTing Ho

    Applied Materials

  • Xiangjin Xie

    Applied Materials

  • Phillip Stout

    Applied Materials

  View abstract →

• Three-Dimensional Flow and Plasma Simulation for ICP Reactor with Different Injector Designs

  ORAL

  Oct. 12, 2023, 1:45 PM – Oct. 12, 2023, 2:00 PM

  Presenters

  • Meihua Zhang

    Eugenus Inc.

  Authors

  • Meihua Zhang

    Eugenus Inc.

  • Yun Yang

    Eugenus Inc.

  • Ryong Hwang

    Eugene Technology

  • Jeonghee Jo

    Eugene Technology

  • Sangdon Lee

    Eugene Technology

  • Sergey Zaretskiy

    Eugene Technology

  • Dongbeen Her

    Eugene Technology

  • David Solomon

    Eugenus Inc.

  View abstract →

• Large-area overdense microwave plasmas

  ORAL · Invited

  Oct. 12, 2023, 2:00 PM – Oct. 12, 2023, 2:30 PM

  Presenters

  • Kallol Bera

    Applied Materials, Inc., Applied Materials

  Authors

  • Kallol Bera

    Applied Materials, Inc., Applied Materials

  View abstract →

• Design and Analysis of a Plasma-Based Reconfigurable and Frequency-Selective Rasorber

  ORAL

  Oct. 12, 2023, 2:30 PM – Oct. 12, 2023, 2:45 PM

  Presenters

  • Md Tanvir Ahmed

    University of Toledo

  Authors

  • Md Tanvir Ahmed

    University of Toledo

  • Krushna Kanth Varikuntla

    The University of Toledo

  • Abbas Semnani

    University of Toledo, The University of Toledo

  View abstract →

• An EVA Cavity-Based Frequency-Selective Plasma Limiter

  ORAL

  Oct. 12, 2023, 2:45 PM – Oct. 12, 2023, 3:00 PM

  Presenters

  • Sandeep Narasapura Ramesh

    University of Toledo

  Authors

  • Sandeep Narasapura Ramesh

    University of Toledo

  • Abbas Semnani

    University of Toledo, The University of Toledo

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• Impedance Matching in Small Antennas through Capacitively-Coupled Plasma Technique

  ORAL

  Oct. 12, 2023, 3:00 PM – Oct. 12, 2023, 3:15 PM

  Presenters

  • Abbas Semnani

    University of Toledo, The University of Toledo

  Authors

  • Abbas Semnani

    University of Toledo, The University of Toledo

  • Kushagra Singhal

    University Of Toledo

  • Samsud Moon

    The University of Toledo, University of Toledo

  View abstract →

• A Conformal Plasma Frequency Selective Surface with Tunable and Switching Performance

  ORAL

  Oct. 12, 2023, 3:15 PM – Oct. 12, 2023, 3:30 PM

  Presenters

  • Krushna Kanth Varikuntla

    The University of Toledo

  Authors

  • Krushna Kanth Varikuntla

    The University of Toledo

  • Abbas Semnani

    University of Toledo, The University of Toledo

  View abstract →