Plasma Surface Interaction II

Presentations

• Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing

  ORAL

  Oct. 12, 2023, 10:00 AM – Oct. 12, 2023, 10:15 AM

  Presenters

  • Byungjo Kim

    Mechatronics Research, Samsung Electronics

  Authors

  • Byungjo Kim

    Mechatronics Research, Samsung Electronics

  • Seokjun Hong

    Mechatronics Research, Samsung Electronics

  • Hyunhak Jeong

    Mechatronics Research, Samsung Electronics

  • Suyoung Yoo

    Mechatronics Research, Samsung Electronics

  • Seongkeun Cho

    Mechatronics Research, Samsung Electronics

  • Sang Ki Nam

    Samsung Electronics Co. Ltd., Mechatronics Research, Samsung Electronics

  • Yihwan Kim

    Mechatronics Research, Samsung Electronics

  View abstract →

• Hybrid Molecular Dynamics-Machine Learning Approach for Efficient Modeling of Particle Growth in Non-Thermal Plasma

  ORAL

  Oct. 12, 2023, 10:15 AM – Oct. 12, 2023, 10:30 AM

  Publication: Plann: Hybrid Molecular Dynamics-Machine Learning Approach for Efficient Modeling of Particle Growth in Non-Thermal Plasma

  Presenters

  • Paolo Elvati

    Department of Chemical Engineering, University of Michigan, Ann Arbor, MI

  Authors

  • Paolo Elvati

    Department of Chemical Engineering, University of Michigan, Ann Arbor, MI

  • Jacob Saldinger

    Department of Chemical Engineering, University of Michigan, Ann Arbor, MI

  • Matt Raymond

    Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI

  • Jonathan Lin

    Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI

  • Angela Violi

    Department of Chemical Engineering; Department of Mechanical Engineering; Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI

  • Xuetao Shi

    Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI

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• Scale-Bridging Simulations for Plasma-Surface Interactions

  ORAL · Invited

  Oct. 12, 2023, 10:30 AM – Oct. 12, 2023, 11:00 AM

  Publication: T. Gergs, T. Mussenbrock, and J. Trieschmann, Sci. Rep. 13, 5287 (2023).<br>T. Gergs, T. Mussenbrock, and J. Trieschmann, J. Phys. D: Appl. Phys. 56, 194001 (2023).<br>T. Gergs, T. Mussenbrock, and J. Trieschmann, J. Phys. D: Appl. Phys. 56, 084003 (2023).<br>T. Gergs, T. Mussenbrock, and J. Trieschmann, J. Appl. Phys. 132, 063302 (2022).<br>T. Gergs, B. Borislavov, and J. Trieschmann, J. Vac. Sci. Technol. B 40, 012802 (2022).<br>T. Gergs, F. Schmidt, T. Mussenbrock, and J. Trieschmann, J. Chem. Theory Comput. 17, 6691-6704 (2021).<br>F. Krüger, T. Gergs, and J. Trieschmann, Plasma Sources Sci. Technol. 28, 035002 (2019).

  Presenters

  • Tobias Gergs

    Ruhr University Bochum

  Authors

  • Tobias Gergs

    Ruhr University Bochum

  • Thomas Mussenbrock

    Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University Bochum

  • Luca Vialetto

    Kiel University

  • Jan Trieschmann

    Kiel University

  View abstract →

• Characterization of Two-Surface Multipactor with Non-Sinusoidal RF Fields

  ORAL

  Oct. 12, 2023, 11:00 AM – Oct. 12, 2023, 11:15 AM

  Presenters

  • Asif iqbal

    Michigan State University

  Authors

  • Asif iqbal

    Michigan State University

  • De-Qi Wen

    Michigan State University, University of California, Berkeley

  • John P. Verboncoeur

    Michigan State University

  • Peng Zhang

    Michigan State University

  View abstract →

• Atomic oxygen surface recombination in glow discharge plasmas

  ORAL

  Oct. 12, 2023, 11:15 AM – Oct. 12, 2023, 11:30 AM

  Presenters

  • Pedro Viegas

    Instituto Superior Técnico - Universidade de Lisboa

  Authors

  • Pedro Viegas

    Instituto Superior Técnico - Universidade de Lisboa

  • José Afonso

    Instituto Superior Técnico - Universidade de Lisboa

  • Jorge Silveira

    Instituto Superior Técnico - Universidade de Lisboa

  • Tiago C Dias

    Instituto de Plasmas e Fusão Nuclear, Universidade de Lisboa, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Instituto Superior Técnico

  • Ana Sofía Morillo Candás

    Laboratoire de Physique des Plasmas

  • Luca Vialetto

    Kiel University

  • Vasco Guerra

    Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Portugal, Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Instituto Superior Tecnico

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• Overcoming Surface Inactivation through Catalytic Design in Low-Temperature Plasma-Catalytic Conversion of Methane to Hydrogen

  ORAL

  Oct. 12, 2023, 11:30 AM – Oct. 12, 2023, 11:45 AM

  Presenters

  • Varanasi Sai Subhankar

    The University of Texas at Austin, The University of Texas at Austin - Department of Aerospace Engineering

  Authors

  • Varanasi Sai Subhankar

    The University of Texas at Austin, The University of Texas at Austin - Department of Aerospace Engineering

  • Charan R Nallapareddy

    The University of Texas at Austin, University of Texas at Austin

  • Thomas C Underwood

    University of Texas at Austin

  View abstract →