Development of asymmetric wireless double probe for two-dimensional measurement

A wafer-type wireless probe using asymmetric double probe is developed to measure two-dimensional plasma parameters (ion density, n_i, and electron temperature, T_e). The asymmetric wireless double probe system operates alone in the chamber. Thus, the two-dimensional plasma parameters can be measured and be monitored in real-time in floating or grounded wall chamber. As the pressures and gap lengths changes, the spatial profile of plasma parameters is changed from convex to saddle shape in inductively coupled plasma by the asymmetric wireless double probe. The measured plasma parameters are in good agreement with a wire two-dimensional floating probe method.