Plasma-chemical kinetics in a parallel plate capillary plasma jet operated in He/H₂O/O₂mixtures

Radio-frequency driven atmospheric pressure plasma jets are suitable sources for reactive species that can be used in a variety of applications in biomedicine and chemical conversion. In these applications, achieving selective and energy efficient species production is often essential. In this work, the plasma-chemical kinetics in a parallel plate plasma jet operated with a glass capillary between the two electrodes are investigated by zero-dimensional simulations.

The glass capillary serves as dielectric and yields a wide range of plasma operating conditions compared to similar sources operating without a dielectric barrier. Consequently, the utilisation of higher power and higher molecular gas admixtures are possible.

Here, we focus on identifying the optimum conditions for the production of H₂O₂ in this source. To do this, the plasma-chemical pathways and energy efficiency of H₂O₂ production are studied under a wide range of operating parameters, such as H₂O- and O₂-admixture, gas flow rate, and power deposition, including the use of pulsed power.

Simulated gas phase H₂O₂ concentrations are compared with those measured in plasma treated liquids using the same source.