Application of Sliding Discharge with Tri-Electrode Dielectric Barrier Discharge for Formation of Planar Atmospheric Pressure Plasma

Atmospheric pressure low temperature plasma has been formed by a tri-electrode dielectric barrier discharge configuration. This electrode configuration is used for sliding discharge in plasma actuators. The plasma is applied on formation of functional thin film with metal organic plasma decomposition. The first electrode, which is covered with an insulator layer, was grounded. The second electrode, which is attached on the insulator layer, was powered by low frequency AC high voltage power supply. The third electrode, which is also attached on the insulator layer, was powered by the other low frequency Ac high voltage power supply. In this experiment, two-dimensional plasma with 20 mm x 20 mm in area has been formed by feeding helium gas.