Coagulation and Condensation Rates in Si Nanoparticle Growth at Different Feeding Durations of Feedstock Using Tandem Modulated Induction Thermal Plasmas

Numerical study was conducted on the distribution of temperature, gas flow velocity and Si nanoparticle density in tandem-type modulated induction thermal plasmas (tandem-MITP) with time-controlled feedstock feeding (TCFF) of Si at different feeding durations. This tandem-MITP+TCFF method has been confirmed for high efficient evaporation of feedstock during on-time and also high efficient nucleation and particle growth suppression during off-time. In this report, condensation and coagulation rates were paid attention for nanoparticle growth because it can be affected by feeding duration. These rates are very important factors in nanoparticle growth. It was shown that Si nanoparticles were more efficiently generated in tandem-MITP, and their growth due to coagulation could be suppressed under the condition of 40% duty factor of feedstock feeding.