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Modeling - Plasma Processing and Chemistry I

ORAL · FW1 · ID: 547501

Presentations

  • Particle-in-Cell Modeling of Electron-Beam Generated Low Electron Temperature Plasma

    ORAL

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    Presenters

    • Willca Villafana

      Princeton Plasma Physics Laboratory, Prince Plasma Physics Laboratory

    Authors

    • Shahid Rauf

      Applied Materials Inc, USA, Applied Materials Inc, Applied Materials, Applied Materials Inc.

    • Dmytro Sydorenko

      University of Alberta

    • Sierra E Jubin

      Princeton University

    • Willca Villafana

      Princeton Plasma Physics Laboratory, Prince Plasma Physics Laboratory

    • Stephane A Ethier

      Princeton Plasma Physics Laboratory

    • Alexander V Khrabrov

      Princeton Plasma Physics Laboratory

    • Igor D Kaganovich

      Princeton Plasma Physics Laboratory, Princeton University, USA, Princeton Plasma Physics Laboratory

    View abstract →

  • Numerical investigation of vacuum ultraviolet emission in Ar-O<sub>2</sub> inductively coupled plasmas

    ORAL

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    Presenters

    • Michel Osca Engelbrecht

      York Plasma Institute, Department of Physics, University of York, UK

    Authors

    • Michel Osca Engelbrecht

      York Plasma Institute, Department of Physics, University of York, UK

    • Christopher P Ridgers

      York Plasma Institute, Department of Physics, University of York, UK

    • Andrew R Gibson

      Research Group for Biomedical Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, Germany., 1) Research Group for Biomedical Plasma Technology, Ruhr-Universität Bochum, Germany; 2) Institute for Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, Germ, Research Group for Biomedical Plasma Technology, Ruhr-University Bochum, Universitätsstraße 150 D-44801 Bo­chum, Germany, Ruhr University Bochum, Germany, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr University Bochum

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  • Effects of amplitude modulation discharge on behavior of oxygen ions in Ar/O<sub>2</sub> capacitively coupled plasma studied by particle-in-cell/Monte Carlo collision model

    ORAL

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    Presenters

    • Iori Nagao

      Kyushu University

    Authors

    • Iori Nagao

      Kyushu University

    • Akihiro Yamamoto

      Kyushu University

    • Yuma Yamamoto

      Kyushu University

    • Kunihiro Kamataki

      Kyushu Univ, Kyushu University, Kyushu University, Japan

    • Takamasa Okumura

      Kyushu University, Kyushu University, Japan

    • Naoto Yamashita

      Kyushu University, Kyushu University, Japan

    • Naho Itagaki

      Kyushu University

    • Kazunori Koga

      Kyushu Univ, Kyushu University, Kyushu University, Japan

    • Masaharu Shiratani

      Kyushu University, Kyushu University, Japan

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  • Plasma species and reaction dynamic-oriented global model studies for microscale argon discharges

    ORAL

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    Publication: planned paper: plasma species and reaction dynamic-oriented global model studies for microscale argon discharges

    Presenters

    • De-Qi Wen

      Michigan State University

    Authors

    • De-Qi Wen

      Michigan State University

    • Peng Zhang

      Michigan State University

    • You-Nian Wang

      Dalian University of Technology, Dalian University of Technolpgy, Dalian University of Technology, China

    • John P. Verboncoeur

      Michigan State University, Department of Electrical and Computer Engineering, Michigan State University

    View abstract →