Analyses of enhancement of energy deposition to electrons by partial resonance in an inductively coupled plasma under confronting divergent magnetic fields

We performed Monte Carlo simulations of a low-pressure inductively coupled plasma under confronting divergent magnetic fields (CDMFs) and observed the electron energy gain (EEG) under different configurations of electric field distributions and magnetic field strengths in order to understand the partial resonance phenomenon and to seek for desirable reactor design for utilization of the partial resonance. The separatrix of the CDMFs has a function to confine plasma, with which high plasma density and low-damage material processing are expected. However, strong magnetic fields suppress the EEG. Then we focus on the EEG by partial resonance observed in a resonant magnetic field region where the magnetic field strength is close to a specific value B_ECR = 2π(m/e) f_rf (e and m are the electronic charge and mass, and f_rf is rf frequency; B_ECR = 0.4844 mT at f_rf = 13.56 MHz) associated with the electron cyclotron resonance. The EEG in the resonant region tends to be higher than in its surrounding region, and this tendency is unchanged even in case the resonant region is far from the rf antenna and even under stronger magnetic fields.