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Magnetron Plasmas

FOCUS · FR1 · ID: 546114

Presentations

  • Electron power absorption in magnetron sputtering discharges

    ORAL · Invited

    –

    Publication: Zheng, B., Fu, Y., Wang, K., Schuelke, T., & Fan, Q. H. (2021). Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target. Plasma Sources Science and Technology, 30(3), 035019. http://dx.doi.org/10.1088/1361-6595/abe9f9

    Presenters

    • Bocong Zheng

      Fraunhofer USA

    Authors

    • Bocong Zheng

      Fraunhofer USA

    • Yangyang Fu

      Tsinghua University

    • Keliang Wang

      Fraunhofer USA

    • Thomas Schuelke

      Fraunhofer USA

    • Qi Hua Fan

      Michigan State University

    View abstract →

  • Modeling of high power impulse magnetron sputtering (HiPIMS) discharges with graphite target

    ORAL

    –

    Publication: [1] C. Huo et al., Journal of Physics D:Applied Physics 50, 354003 (2017).<br>[2] H. Eliasson et al. Plasma Sources Science and Technology 30, 115017 (2021)

    Presenters

    • Jon T Gudmundsson

      University of Iceland

    Authors

    • Henrik Eliasson

      Linkoping University

    • Martin Rudolph

      Leibniz Institute of Surface Engineering (IOM)

    • Kateryna Barynova

      University of Iceland

    • Nils Brenning

      KTH Royal Institute of Technology

    • Michael A Raadu

      KTH Royal Institute of Technology

    • Hamidreza Hajihoseini

      University of Twente

    • Tiberiu M Minea

      Laboratoire de Physique des Gaz et Plasmas-LPGP, Universite Paris-Saclay

    • Daniel Lundin

      Linkoping University

    • Jon T Gudmundsson

      University of Iceland

    View abstract →

  • Study of ac magnetically enhanced capacitively coupled plasma argon discharges using particle-in-cell simulations

    ORAL

    –

    Presenters

    • Ming-Chieh Lin

      Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    Authors

    • Kaviya Aranganadin

      Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    • Guoning Wang

      Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    • Hua-Yi Hsu

      Department of Mechanical Engineering, National Taipei University of Technology

    • John P. Verboncoeur

      Michigan State University, Department of Electrical and Computer Engineering, Michigan State University

    • Ming-Chieh Lin

      Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    View abstract →

  • Electron energization via ExB drift generation in rf magnetrons operated at a low pressure

    ORAL

    –

    Publication: "Electron dynamics in magnetized CCRF discharges: I. The mechanism of Hall heating and the mu-mode", planned to be submitted to PSST

    Presenters

    • Denis Eremin

      Ruhr Univ Bochum

    Authors

    • Denis Eremin

      Ruhr Univ Bochum

    • Birk Berger

      Ruhr Univ Bochum

    • Jens Kallähn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Kevin Köhn

      Ruhr Univ Bochum

    • Dennis Krueger

      Ruhr Univ Bochum

    • Liang Xu

      Ruhr Univ Bochum

    • Peter Awakowicz

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum., Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, Germany., Ruhr Univ Bochum, Ruhr University Bochum

    • Julian Schulze

      Ruhr-University Bochum, Ruhr Univ Bochum, Ruhr University Bochum, Dalian University of Technology, Ruhr-University Bochum, Germany

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    View abstract →

  • Formation and sustainment of spokes in planar dc magnetrons

    ORAL

    –

    Presenters

    • Denis Eremin

      Ruhr Univ Bochum

    Authors

    • Denis Eremin

      Ruhr Univ Bochum

    • Liang Xu

      Ruhr Univ Bochum

    • Jens Kallähn

      Ruhr Univ Bochum, Ruhr University Bochum

    • Kevin Koehn

      Ruhr Univ Bochum

    • Dennis Krueger

      Ruhr Univ Bochum

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum

    View abstract →