Kinetic Simulation of Narrow Gap Discharge

Starting from Townsend’s theory for the gas breakdown, there have been numerous studies attempting to understand the mechanism of the discharge under various conditions [1]. Especially, recent studies [2,3] proposed a universal theory for a gas breakdown from microscale to the Paschen law. They implemented equations with dimensionless variables to derive the breakdown conditions. In contrast to the model developed with simplified geometry and operating condition, the actual plasma process contains complex variables such as background plasma, complex gap geometry, plasma-solid interaction, magnetic field, and pressure gradient in the narrow gap. These variables make the model difficult to solve with analytical equations and to understand the narrow gap discharge mechanism. From the collaborative project with the kinetic simulation of Princeton Plasma Physics Laboratory, we introduce the detailed breakdown mechanism in these complex conditions and provide solutions to prevent unexpected discharge in the semiconductor-process chamber.

[1] J. Y. Kim, I. D. Kaganovich, and H. C. Lee, "Review of the gas breakdown physics and nanomaterial-based ionization gas sensors and their applications." Plasma Sources Science and Technology 31.3 (2022): 033001.

[2] D. B. Go, and A. Venkattraman "Microscale gas breakdown: ion-enhanced field emission and the modified Paschen’s curve." Journal of Physics D: Applied Physics 47.50 (2014): 503001.

[3] A. M. Loveless, and A. L. Garner. "A universal theory for gas breakdown from microscale to the classical Paschen law." Physics of Plasmas 24.11 (2017): 113522.