Plasma Surface Interaction II

Presentations

• A global plasma and surface model of a hydrogen/methane inductively coupled discharges for the purpose of minimal optical transmission loss in Extreme-Ultra-Violet lithography machines

  ORAL

  Oct. 5, 2022, 1:30 AM – Oct. 5, 2022, 1:45 AM

  Presenters

  • Efe Kemaneci

    ASML

  Authors

  • Efe Kemaneci

    ASML

  • Achim von Keudell

    Experimentalphysik, insbesondere Physik reaktiver Plasmen, Ruhr Uni Bochum

  • Andrei Yakunin

    ASML

  • Andrey Nikipelov

    ASML

  • Mark van de Kerkhof

    ASML

  • Vadim Banine

    ASML

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• Implementation of Interatomic Potential for Charged Particle Collision

  ORAL

  Oct. 5, 2022, 1:45 AM – Oct. 5, 2022, 2:00 AM

  Presenters

  • Yuto Toda

    National Institute for Fusion Science

  Authors

  • Yuto Toda

    National Institute for Fusion Science

  • Arimichi Takayama

    National Institute for Fusion Science, National Institutes of Natural Sciences, National Institute for Fusion Science

  • Atsushi M Ito

    National Institute for Fusion Science, National Institutes of Natural Sciences, National Institute for Fusion Science

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• Machine learning plasma-surface interactions: from low to high fidelity surrogate models

  ORAL · Invited

  Oct. 5, 2022, 2:00 AM – Oct. 5, 2022, 2:30 AM

  Publication: F. Krüger, T. Gergs, and J. Trieschmann, Plasma Sources Sci. Technol. 28, 035002 (2019).<br>T. Gergs, B. Borislavov, and J. Trieschmann, Journal of Vacuum Science & Technology B 40, 012802 (2022).<br>T. Gergs, T. Mussenbrock, and J. Trieschmann, ArXiv:2110.00356 [Cond-Mat] (2021).

  Presenters

  • Jan Trieschmann

    Kiel University, Christian-Albrechts-Universität zu Kiel, Theoretical Electrical Engineering, Faculty of Engineering, Kiel University

  Authors

  • Jan Trieschmann

    Kiel University, Christian-Albrechts-Universität zu Kiel, Theoretical Electrical Engineering, Faculty of Engineering, Kiel University

  • Tobias Gergs

    Ruhr University Bochum

  • Thomas Mussenbrock

    Ruhr University Bochum

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• Deep learning model for ion sputtering dynamics with molecular dynamics simulation

  ORAL

  Oct. 5, 2022, 2:30 AM – Oct. 5, 2022, 2:45 AM

  Presenters

  • Jinkyu Bae

    Mechatronics Research, Samsung Electronics Co.

  Authors

  • Byungjo Kim

    Mechatronics Research, Samsung Electronics Co.

  • Jinkyu Bae

    Mechatronics Research, Samsung Electronics Co.

  • Hyunhak Jeong

    Mechatronics Research, Samsung Electronics Co.

  • Suyoung Yoo

    Mechatronics Research, Samsung Electronics Co.

  • Sang Ki Nam

    Mechatronics Research, Samsung Electronics Co., Mechatronics Research, Samsung Electronics Co., Ltd.,

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• Transfer Learning Model with Simulation and Experimental Data for Tool Virtualization in Poly-Si Etching

  ORAL

  Oct. 5, 2022, 2:45 AM – Oct. 5, 2022, 3:00 AM

  Presenters

  • Takeshi Nakayama

    Hitachi Ltd.

  Authors

  • Takeshi Nakayama

    Hitachi Ltd.

  • Tsutomu Tetsuka

    Hitachi High-Tech, Ltd.

  • Tomohiro Sekine

    Hitachi Ltd.

  • Takeshi Ohmori

    Hitachi Ltd.

  View abstract →