Capacitively Coupled Plasmas II

Presentations

• Experimental and computational study of the electron power absorption in capacitively coupled neon-oxygen plasmas

  ORAL

  Oct. 6, 2022, 12:30 AM – Oct. 6, 2022, 12:45 AM

  Presenters

  • Aranka Derzsi

    Wigner Research Centre for Physics, Hung, Wigner Research Centre, Hungary

  Authors

  • Aranka Derzsi

    Wigner Research Centre for Physics, Hung, Wigner Research Centre, Hungary

  • Peter Hartmann

    Wigner Research Centre for Physics

  • Mate Vass

    Ruhr University Bochum, Wigner Research Centre for Physics

  • Benedek Horvath

    Wigner Research Center for Physics

  • Marton Gyulai

    Wigner Research Centre for Physics

  • Ihor Korolov

    Ruhr University Bochum, Bochum University

  • Julian Schulze

    Ruhr-University Bochum, Ruhr Univ Bochum, Ruhr University Bochum, Dalian University of Technology, Ruhr-University Bochum, Germany

  • Zoltán Donkó

    Wigner Research Centre for Physics

  View abstract →

• Effect of voltage waveform tailoring and an additional 60 MHz frequency on the ion flux energy distribution function in a low pressure capacitively coupled radio frequency plasma

  ORAL

  Oct. 6, 2022, 12:45 AM – Oct. 6, 2022, 1:00 AM

  Presenters

  • Gerrit Hübner

    Ruhr Universität Bochum

  Authors

  • Gerrit Hübner

    Ruhr Universität Bochum

  • Ihor Korolov

    Ruhr University Bochum, Ruhr-Uni­ver­si­tät Bo­chum, Ruhr-University Bochum

  • Stefan Ries

    Ruhr-Uni­ver­si­tät Bo­chum

  • Soheil Karimi Aghda

    RWTH Aachen

  • Jochen M Schneider

    RWTH Aachen

  • Jan Trieschmann

    Kiel University, Christian-Albrechts-Universität zu Kiel, Theoretical Electrical Engineering, Faculty of Engineering, Kiel University

  • Thomas Mussenbrock

    Ruhr University Bochum, Bochum University, Ruhr-Uni­ver­si­tät Bo­chum, Applied Electrodynamics and Plasma Technology, Department of Electrical Engineering and Information Sciences, Ruhr Uni­ver­si­ty Bo­chum

  • Julian Schulze

    Ruhr University Bochum, Bochum University, Ruhr-Uni­ver­si­tät Bo­chum, Ruhr University Bochum, Germany, Ruhr-University Bochum; Dalian University of Technology, Ruhr-University Bochum

  • Peter Awakowicz

    Chair of Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, Germany, Ruhr University Bochum, Ruhr-Uni­ver­si­tät Bo­chum

  • Tobias Gergs

    Ruhr University Bochum

  View abstract →

• Stratification of Capacitively Coupled Plasma in Noble Gases

  ORAL

  Oct. 6, 2022, 1:00 AM – Oct. 6, 2022, 1:15 AM

  Presenters

  • Robert Arslanbekov

    CFD Research Corporation

  Authors

  • Vladimir I Kolobov

    CFDRC, University of Alabama in Huntsville

  • Robert Arslanbekov

    CFD Research Corporation

  View abstract →

• The mechanism of frequency coupling in low pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis

  ORAL

  Oct. 6, 2022, 1:15 AM – Oct. 6, 2022, 1:30 AM

  Publication: Vass M, Wang L, Wilczek S, Lafleur T, Brinkmann R P, Donko Z and Schulze J, "Frequency coupling in low pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis", submitted to PSST<br><br>

  Presenters

  • Máté Vass

    Ruhr University Bochum, Germany, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, 44780 Bochum, Germany

  Authors

  • Máté Vass

    Ruhr University Bochum, Germany, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, 44780 Bochum, Germany

  • Li Wang

    Dalian University of Technology, Ruhr-University Bochum

  • Sebastian Wilczek

    Ruhr University Bochum

  • Trevor Lafleur

    ThrustMe, ThrustMe, Verrières-le-Buisson F-91370, France

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum

  • Zoltan Donko

    Wigner Research Center, Wigner Research Center for Physics

  • Julian Schulze

    Ruhr University Bochum, Bochum University, Ruhr-Uni­ver­si­tät Bo­chum, Ruhr University Bochum, Germany, Ruhr-University Bochum; Dalian University of Technology, Ruhr-University Bochum

  View abstract →

• Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p₁ and Ne 2p₁ in Ar and Ar/Ne capacitively coupled plasmas

  ORAL

  Oct. 6, 2022, 1:30 AM – Oct. 6, 2022, 1:45 AM

  Presenters

  • Michihiro Otaka

    Kyushu University, Japan

  Authors

  • Michihiro Otaka

    Kyushu University, Japan

  • Toshiaki Arima

    Kyushu University, Japan

  • Jian-syun Lai

    Kyushu University, Japan

  • Kizuki Ikeda

    Kyushu University, Japan

  • Kunihiro Kamataki

    Kyushu Univ, Kyushu University, Kyushu University, Japan

  • Naoto Yamashita

    Kyushu University, Kyushu University, Japan

  • Takamasa Okumura

    Kyushu University, Kyushu University, Japan

  • Naho Itagaki

    Kyushu University, Kyushu University, Japan

  • Kazunori Koga

    Kyushu Univ, Kyushu University, Kyushu University, Japan

  • Masaharu Shiratani

    Kyushu University, Kyushu University, Japan

  View abstract →

• Generation of surface modes and plasma uniformity in VHF CCP reactors studied with a EM PIC code

  ORAL

  Oct. 6, 2022, 1:45 AM – Oct. 6, 2022, 2:00 AM

  Presenters

  • Denis Eremin

    Ruhr Univ Bochum

  Authors

  • Denis Eremin

    Ruhr Univ Bochum

  • Efe Kemaneci

    Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr Univ Bochum

  • Masaaki Matsukuma

    Tokyo Electron Technology Solutions Limited, TEL

  • Thomas Mussenbrock

    Ruhr University Bochum, Bochum University, Ruhr-Uni­ver­si­tät Bo­chum, Applied Electrodynamics and Plasma Technology, Department of Electrical Engineering and Information Sciences, Ruhr Uni­ver­si­ty Bo­chum

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum

  View abstract →

• Current and voltage (I-V) characteristics of intermediate pressure plasma

  ORAL

  Oct. 6, 2022, 2:00 AM – Oct. 6, 2022, 2:15 AM

  Presenters

  • Shadhin Hussain

    University of Texas at Dallas

  Authors

  • Shadhin Hussain

    University of Texas at Dallas

  • Matthew Goeckner

    University of Texas at Dallas

  View abstract →

• Wave Characteristics in E×B Source: Pressure-Dependent Evolution of Plasma Oscillation Phenomena

  ORAL

  Oct. 6, 2022, 2:15 AM – Oct. 6, 2022, 2:30 AM

  Presenters

  • Cheongbin Cheon

    Department of Electrical Engineering, Pusan National University, Busan, Korea

  Authors

  • June Young Kim

    Department of Nuclear Engineering, Seoul National University, Seoul, Korea, Seoul National University

  • Cheongbin Cheon

    Department of Electrical Engineering, Pusan National University, Busan, Korea

  • Jinyoung Choi

    Department of Nuclear Engineering, Seoul National University, Seoul, Korea

  • Y. S. Hwang

    Seoul National University, Department of Nuclear Engineering, Seoul National University, Seoul, Korea, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, S. Korea

  • Kyoung-Jae Chung

    Seoul National University, Department of Nuclear Engineering, Seoul National University, Seoul, Korea, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, S. Korea

  • Hae June Lee

    Pusan Natl Univ, Pusan National University, Department of Electrical Engineering, Pusan National University, Busan, Korea

  View abstract →