Reactive Plasma Award Talk

Presentations

• Evolution of reactive plasma processes by radical control

  ORAL · Invited

  Oct. 4, 2022, 10:00 PM – Oct. 4, 2022, 11:00 PM

  Presenters

  • Masaru Hori

    Nagoya Univ, Nagoya University, Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.

  Authors

  • Masaru Hori

    Nagoya Univ, Nagoya University, Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.

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