Capacitively Coupled Plasmas I

Presentations

• Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion

  ORAL · Invited

  Oct. 3, 2022, 9:00 PM – Oct. 3, 2022, 9:30 PM

  Publication: [1] Sun et al 2022 Plasma Sources Sci. Technol. 31 045011<br>[2] Zhang et al 2021 Phys. Rev. E 104, 045209

  Presenters

  • Jing-Yu Sun

    Dalian University of Technology, Dalian University of Technology, China

  Authors

  • Jing-Yu Sun

    Dalian University of Technology, Dalian University of Technology, China

  • Quan-Zhi Zhang

    Dalian University of Technology, Dalian University of Technology, China

  • Julian Schulze

    Ruhr-University Bochum, Ruhr Univ Bochum, Ruhr University Bochum, Dalian University of Technology, Ruhr-University Bochum, Germany

  • You-Nian Wang

    Dalian University of Technology, Dalian University of Technolpgy, Dalian University of Technology, China

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• GEC Student Excellence Award Finalist Presentation - Uniformity control by customized electrode designs in capacitive RF plasmas

  ORAL

  Oct. 3, 2022, 9:30 PM – Oct. 3, 2022, 9:45 PM

  Publication: J. Vac. Sci. Technol. A 39, 063004 (2021); doi: 10.1116/6.0001327

  Presenters

  • Li Wang

    Dalian University of Technology, Ruhr-University Bochum

  Authors

  • Li Wang

    Dalian University of Technology, Ruhr-University Bochum

  • Peter Hartmann

    Wigner Research Center for Physics

  • Zoltan Donko

    Wigner Research Center, Wigner Research Center for Physics

  • Yuan-Hong Song

    Dalian University of Technology

  • Julian Schulze

    Ruhr University Bochum, Bochum University, Ruhr-Uni­ver­si­tät Bo­chum, Ruhr University Bochum, Germany, Ruhr-University Bochum; Dalian University of Technology, Ruhr-University Bochum

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• Effect of the low-frequency voltage on nonlinear standing wave excitation in dual-frequency asymmetric capacitive discharges

  ORAL

  Oct. 3, 2022, 9:45 PM – Oct. 3, 2022, 10:00 PM

  Presenters

  • Fang-Jie Zhou

    Dalian University of Technology

  Authors

  • Fang-Jie Zhou

    Dalian University of Technology

  • Jian-Kai Liu

    Dalian University of Technology

  • Kai Zhao

    Dalian University of Technology

  • You-Nian Wang

    Dalian University of Technology, Dalian University of Technolpgy, Dalian University of Technology, China

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• Surface effects in a capacitive argon discharge in the intermediate pressure regime

  ORAL

  Oct. 3, 2022, 10:00 PM – Oct. 3, 2022, 10:15 PM

  Publication: [1] Gudmundsson et al. Plasma Sources Science and Technology, 30 (2021) 125011

  Presenters

  • Jon T Gudmundsson

    University of Iceland

  Authors

  • Jon T Gudmundsson

    University of Iceland

  • Janez Krek

    Michigan State University

  • De-Qi Wen

    Michigan State University

  • Emi Kawamura

    University of California, Berkeley

  • Michael A Lieberman

    University of California, Berkeley

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• The effects of different boundary surface materials on electron power absorption dynamics in capacitive RF plasmas

  ORAL

  Oct. 3, 2022, 10:15 PM – Oct. 3, 2022, 10:30 PM

  Presenters

  • Florian Beckfeld

    Ruhr-University Bochum

  Authors

  • Florian Beckfeld

    Ruhr-University Bochum

  • David A. Schulenberg

    Ruhr-University Bochum

  • Ihor Korolov

    Ruhr University Bochum, Ruhr-Uni­ver­si­tät Bo­chum, Ruhr-University Bochum

  • Julian Schulze

    Ruhr University Bochum, Bochum University, Ruhr-Uni­ver­si­tät Bo­chum, Ruhr University Bochum, Germany, Ruhr-University Bochum; Dalian University of Technology, Ruhr-University Bochum

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• Kinetic behaviors of secondary electrons in magnetized capacitively coupled argon plasmas

  ORAL

  Oct. 3, 2022, 10:30 PM – Oct. 3, 2022, 10:45 PM

  Presenters

  • Hui Wen

    Dalian University of Technology

  Authors

  • Hui Wen

    Dalian University of Technology

  • Jing-Yu Sun

    Dalian University of Technology, Dalian University of Technology, China

  • Quan-Zhi Zhang

    Dalian University of Technology, Dalian University of Technology, China

  • You-Nian Wang

    Dalian University of Technology, Dalian University of Technolpgy, Dalian University of Technology, China

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• GEC Student Excellence Award Finalist Presentation - Striations in dual-low-frequency (2/10 MHz) driven capacitively coupled CF₄ plasma

  ORAL

  Oct. 3, 2022, 10:45 PM – Oct. 3, 2022, 11:00 PM

  Presenters

  • Xiao-Kun Wang

    Dalian University of Technology

  Authors

  • Xiao-Kun Wang

    Dalian University of Technology

  • Yong-Xin Liu

    Dalian University of Technology

  • Julian Schulze

    Ruhr-University Bochum, Ruhr Univ Bochum, Ruhr University Bochum, Dalian University of Technology, Ruhr-University Bochum, Germany

  • Zoltán Donkó

    Wigner Research Centre for Physics

  • You-Nian Wang

    Dalian University of Technology, Dalian University of Technolpgy, Dalian University of Technology, China

  View abstract →