Applications of plasma-enhanced deposition technologies in the semiconductor industry

The high-performance semiconductor devices have been demanded in various fields, such as mobile, on-device AI, GFX, cloud AI and data center. We have been developing core technologies on advanced semiconductor manufacturing equipment for the next generation semiconductor devices of DRAM, NAND and Logic. In this talk, the technology trend for the next generation semiconductor devices is reviewed. And then, in special, technology issues related to plasma-enhanced deposition methods in the semiconductor industry are introduced and discussed.