Plasma Applications

Presentations

• Microplasma-Driven Atomic Layer Deposition of Aluminum Oxide Etch-Free Patterning, and Gallium Oxide-Based Flexible DUV Photodetector

  ORAL

  Oct. 8, 2021, 9:00 AM – Oct. 8, 2021, 9:15 AM

  Presenters

  • Jinhong Kim

    University of Illinois at Urbana-Champai

  Authors

  • Jinhong Kim

    University of Illinois at Urbana-Champai

  • Dane J Sievers

    University of Illinois Urbana Champaign

  • Sung-Jin Park

    University of Illinois, Eden Park Illumination, University of Illinois at Urbana-Champai, University of Illinois

  • J. Gary Eden

    University of Illinois at Urbana-Champaign

  View abstract →

• Optimizing the deposition rate and ionized flux fraction of a high power impulse magnetron sputtering discharge

  ORAL · Invited

  Oct. 8, 2021, 9:15 AM – Oct. 8, 2021, 9:45 AM

  Publication: M. Rudolph, N. Brenning, M. A. Raadu, H. Hajihoseini,J. T. Gudmundsson, A. Anders, and D. Lundin, Plasma Sources Science and Technology 29, 05LT01 (2020).<br>N. Brenning, A. Butler, H. Hajihoseini, M. Rudolph, M. A.Raadu, J. T. Gudmundsson, T. Minea, and D. Lundin, Journal of Vacuum Science and Technology A38, 033008 (2020).<br>N. Brenning, H. Hajihoseini, M. Rudolph, M. A. Raadu, J. T. Gudmundsson, T. M. Minea and D. Lundin, Plasma Sources Science and Technology 30, 015015 (2021).

  Presenters

  • Martin Rudolph

    Leibniz Institute of Surface Engineering (IOM), Leipzig, Germany

  Authors

  • Martin Rudolph

    Leibniz Institute of Surface Engineering (IOM), Leipzig, Germany

  • Nils Brenning

    KTH Royal Institute of Technology, Stockholm, Sweden

  • Hamidreza Hajihoseini

    Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, Enschede, The Netherlands

  • Michael A Raadu

    KTH Royal Institute of Technology, Stockholm, Sweden

  • Tiberiu M Minea

    Laboratoire de Physique des Gaz et Plasmas, UMR 8578 CNRS, Université Paris–Saclay, Orsay, France, Paris Saclay University, LPGP, CNRS

  • Andre Anders

    Leibniz Institute of Surface Engineering (IOM), Leipzig, Germany

  • Jon T Gudmundsson

    Science Institute, University of Iceland, Reykjavik, Iceland, Univ of Iceland

  • Daniel Lundin

    Plasma and Coatings Physics Division, Linköping University, Linköping, Sweden

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• Plasma Ion Doping for Semiconductor Applications

  ORAL

  Oct. 8, 2021, 9:45 AM – Oct. 8, 2021, 10:00 AM

  Presenters

  • Hongwen Yan

    IBM TJ Watson Research Center

  Authors

  • Hongwen Yan

    IBM TJ Watson Research Center

  • Hiro Miyazoe

    IBM Research, T.J. Watson Research Center

  • Marinus Hopstaken

    IBM Research, T.J. Watson Research Center

  • Sebastian Engelmann

    IBM Research, T.J. Watson Research Center

  • Takashi Ando

    IBM Research, T.J. Watson Research Center

  • Kevin Chan

    na

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• KrCl^* Far UV-C Microplasma Flat Lamp: Prevention of Airborne Transmission of Pathogens with Human Safety

  ORAL

  Oct. 8, 2021, 10:00 AM – Oct. 8, 2021, 10:15 AM

  Presenters

  • Sung-Jin Park

    University of Illinois, Eden Park Illumination, University of Illinois at Urbana-Champai, University of Illinois

  Authors

  • Sung-Jin Park

    University of Illinois, Eden Park Illumination, University of Illinois at Urbana-Champai, University of Illinois

  • James G Eden

    University of Illinois

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• Water Interacting with Nanostructured Plasma Polymer Films

  ORAL

  Oct. 8, 2021, 10:15 AM – Oct. 8, 2021, 10:30 AM

  Publication: E. Bülbül, D. Hegemann, K. Ataka, S. Lehner, J. Heberle, M. Heuberger, Surf. Interfaces 23, 2021, 100922<br>D. Hegemann, E. Bülbül, B. Hanselmann, U. Schütz, M. Amberg, S. Gaiser, Plasma Process. Polym. 18, 2021, e2000176

  Presenters

  • Dirk Hegemann

    Empa, Swiss Federal Laboratory for Mater

  Authors

  • Dirk Hegemann

    Empa, Swiss Federal Laboratory for Mater

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• Plasma enhanced chemical vapour depositon of ZrO₂ based layers

  ORAL

  Oct. 8, 2021, 10:30 AM – Oct. 8, 2021, 10:45 AM

  Presenters

  • Philipp A Maaß

    Ruhr-University Bochum, Ruhr-University bochum

  Authors

  • Philipp A Maaß

    Ruhr-University Bochum, Ruhr-University bochum

  • Vitali Bedarev

    Ruhr-University Bochum

  • Sebastian M. J Beer

    Ruhr-University Bochum

  • Marina Prenzel

    Ruhr-University Bochum

  • Marc Böke

    Ruhr-University Bochum, Experimental Physics II, Faculty of Physics and Astronomy, Ruhr-University Bochum, Germany, 1Ruhr-University Bochum, Experimental Physics II, RUB Physik EPII; CRC 1316

  • Anjana Devi

    Ruhr-University Bochum

  • Achim von Keudell

    Ruhr-University Bochum, Experimental Physics II, Bochum

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