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Plasma Diagnostic: Electrical Diagnostics II

FOCUS · SR52 · ID: 24607





Presentations

  • Recent progress on cutoff probe development for real time processing monitoring

    ORAL · Invited

    Publication: 1. D.W.Kim and S.J. You et al., Plasma Sources Sci. Technol. 28(2019) 015004<br>2. S. J. Kim and S. J. You et al., Plasma Sources Sci. Technol. 28(2019) 055014<br>3. S. J. Kim and S. J. You et al., AIP Advances 11, (2021) 025241

    Presenters

    • Shin Jae You

      Chungnam Natl Univ, Department of Physics, Chungnam National University

    Authors

    • Shin Jae You

      Chungnam Natl Univ, Department of Physics, Chungnam National University

    • SiJun Kim

      Chungnam Natl Univ

    • daewoong kim

      Korea Institute of Machinery and Materials (KIMM)

    View abstract →

  • Spectra of a geometry improved ideal model of the pMRP

    ORAL

    Presenters

    • Michael Friedrichs

    Authors

    • Michael Friedrichs

    • Jens Oberrath

      South Westphalia University of Applied Sciences, South Westphalia University of Applied Science

    • Dennis Pohle

      Ruhr University Bochum, Institute of Microwave Systems

    • Ilona Rolfes

      Ruhr University Bochum, Institute of Microwave Systems

    • Chunjie Wang

      Ruhr University Bochum, Institute of Theoretical Electrical Engineering

    • Ralf Peter Brinkmann

      Ruhr University Bochum, Institute of Theoretical Electrical Engineering, Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany

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  • Kinetic modeling of the planar Multipole Resonance Probe

    ORAL

    Presenters

    • Chunjie Wang

      Ruhr University Bochum

    Authors

    • Chunjie Wang

      Ruhr University Bochum

    • Michael Friedrichs

      South Westphalia University of Applied Sciences

    • Jens Oberrath

      South Westphalia University of Applied Sciences, South Westphalia University of Applied Science

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum, Ruhr University Bochum

    View abstract →