A semi-analytical RF sheath model

The dynamics of radio frequency driven capacitively coupled plasma (RF-CCP) is, to a large extent, determined by the characteristics of the boundary sheath. Reliable models of the sheath are therefore of theoretical and practical interest. Particularly interesting are “semi-analytical” models which describe the particle densities and the electrical field of the sheath in a compact form. This contribution presents a semi-analytical model of the RF modulated boundary sheath which applies for a wide range of excitation waveforms and amplitudes, and levels of collisionality. In contrast to many other sheath models, it is not based on the quasi-static assumption and therefore suited to describe dynamical phenomena such as field reversal and anomalous heating.