Magnetically Enhanced Plasmas

Presentations

• Operating modes of a magnetized direct-current discharge in helium

  ORAL

  Oct. 6, 2021, 4:45 PM – Oct. 6, 2021, 5:00 PM

  Publication: D. Levko, R. R. Upadhyay and L. L. Raja, J. Appl. Phys. 129, 183307 (2021)

  Presenters

  • Dmitry Levko

    Esgee Technologies

  Authors

  • Dmitry Levko

    Esgee Technologies

  • Rochan Upadhyay

    Esgee Technologies

  • Laxminarayan L Raja

    University of Texas at Austin, The University of Texas at Austin

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• Electron heating transition in direct current magnetron sputtering discharges

  ORAL

  Oct. 6, 2021, 5:00 PM – Oct. 6, 2021, 5:15 PM

  Publication: Bocong Zheng, Yangyang Fu, Huihui Wang, Keliang Wang, Thomas Schuelke, Qi Hua Fan, Breathing oscillation and electron energization in magnetron discharges. [In preparation]

  Presenters

  • Bocong Zheng

    Fraunhofer USA, Fruahnhofer Institute, Michigan State University

  Authors

  • Bocong Zheng

    Fraunhofer USA, Fruahnhofer Institute, Michigan State University

  • Yangyang Fu

    Tsinghua University

  • Huihui Wang

    Tsinghua University

  • Keliang Wang

    Fraunhofer USA

  • Thomas Schuelke

    Fraunhofer USA

  • Qi Hua Fan

    Michigan State University

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• Fundamental investigations of the hysteresis effect in magnetically enhanced reactive sputter processes

  ORAL

  Oct. 6, 2021, 5:15 PM – Oct. 6, 2021, 5:30 PM

  Presenters

  • Birk Berger

    Ruhr-University Bochum, Germany, Ruhr Univ Bochum

  Authors

  • Birk Berger

    Ruhr-University Bochum, Germany, Ruhr Univ Bochum

  • Julian Roggendorf

    Ruhr Univ Bochum

  • Dennis Engel

    Ruhr Univ Bochum

  • Christian Woelfel

    Ruhr Univ Bochum

  • Denis Eremin

    Ruhr Univ Bochum

  • Jan Lunze

    Ruhr Univ Bochum

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum, Ruhr University Bochum

  • Peter Awakowicz

    Ruhr-University Bochum, Ruhr University Bochum, Ruhr Univ Bochum, Ruhr-University Bochum, Germany

  • Julian Schulze

    Ruhr University Bochum, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr Univ Bochum, Ruhr-University Bochum, Germany; Dalian University of Technology, China, Ruhr University Bochum, Dalian University of Technology, Ruch Univ Bochum, Germany, Ruhr-University Bochum

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• Plasma series resonance in capacitive discharges with transverse magnetic field

  ORAL

  Oct. 6, 2021, 5:30 PM – Oct. 6, 2021, 5:45 PM

  Presenters

  • Dennis Engel

    Ruhr Univ Bochum

  Authors

  • Dennis Engel

    Ruhr Univ Bochum

  • Birk Berger

    Ruhr-University Bochum, Germany, Ruhr Univ Bochum

  • Christian Woelfel

    Ruhr Univ Bochum

  • Jan Lunze

    Ruhr Univ Bochum

  • Peter Awakowicz

    Ruhr Univ Bochum, Ruhr University Bochum

  • Julian Schulze

    University of Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr Univ Bochum, Bochum University, Ruhr University Bochum & Dalian University of Technology, Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University Bochum, Ruhr University Bochum and Dalian University of Technology, Ruhr-University Bochum, Germany; Dalian University of Technology, China

  • Denis Eremin

    Ruhr Univ Bochum

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum, Ruhr University Bochum

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• Identification of gradient drift instability evolving into a rotating spoke in a crossed field plasma

  ORAL

  Oct. 6, 2021, 5:45 PM – Oct. 6, 2021, 6:00 PM

  Publication: Liang Xu, Denis Eremin and Ralf Peter Brinkmann 2021 Plasma Sources Sci. Technol. in press https://doi.org/10.1088/1361-6595/ac0487

  Presenters

  • Liang Xu

    Ruhr Univ Bochum

  Authors

  • Liang Xu

    Ruhr Univ Bochum

  • Denis Eremin

    Ruhr Univ Bochum

  • Ralf Peter Brinkmann

    Ruhr Univ Bochum, Ruhr University Bochum

  View abstract →