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Capacitively Coupled Plasmas II

ORAL · JW61 · ID: 14017

Presentations

  • Student Excellence Award Finalist: Collisional electron momentum loss in low temperature plasmas: On the validity of the classical approximation

    ORAL

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    Publication: Vass M, Wilczek S, Lafleur T, Brinkmann R P, Donkó Z & Schulze J 2021 "Collisional electron momentum loss in low temperature plasmas: On the validity of the classical approximation" Plasma Sources Sci. Technol., accepted maunsript

    Presenters

    • Mate Vass

      Ruhr University Bochum, Wigner Research Centre for Physics, Ruhr University Bochum & Wigner Research Centre for Physics

    Authors

    • Mate Vass

      Ruhr University Bochum, Wigner Research Centre for Physics, Ruhr University Bochum & Wigner Research Centre for Physics

    • Sebastian Wilczek

      Ruhr University Bochum, Ruhr-University Bochum, Germany, Ruhr University, Bochum, Germany

    • Trevor Lafleur

      ThrustMe, PlasmaPotential--Physics Consulting and Research

    • Ralf Peter Brinkmann

      Ruhr Univ Bochum, Ruhr University Bochum

    • Zoltan Donko

      Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary, Wigner Research Center for Physics, Wigner Research Centre for Physics, Wigner Research Center

    • Julian Schulze

      University of Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr Univ Bochum, Bochum University, Ruhr University Bochum & Dalian University of Technology, Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University Bochum, Ruhr University Bochum and Dalian University of Technology, Ruhr-University Bochum, Germany; Dalian University of Technology, China

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  • Study of plasma characteristics in capacitive discharges operated at very low pressure and in kV range triggered by very high radio-frequency

    ORAL

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    Presenters

    • Sarveshwar Sharma

      Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India -382428

    Authors

    • Sarveshwar Sharma

      Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India -382428

    • Igor Kaganovich

      Princeton Plasma Physics Laboratory

    • Alexander V Khrabrov

      Princeton Plasma Physics Laboratory

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  • The effect of secondary electrons in low-pressure capacitively coupled oxygen plasmas

    ORAL

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    Publication: I am working on a manuscript in which I plan to publish the results to be introduced in the talk.

    Presenters

    • Benedek Horvath

      Wigner Research Center for Physics

    Authors

    • Benedek Horvath

      Wigner Research Center for Physics

    • Zoltan Donko

      Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary, Wigner Research Center for Physics, Wigner Research Centre for Physics, Wigner Research Center

    • Julian Schulze

      University of Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr Univ Bochum, Bochum University, Ruhr University Bochum & Dalian University of Technology, Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University Bochum, Ruhr University Bochum and Dalian University of Technology, Ruhr-University Bochum, Germany; Dalian University of Technology, China

    • Aranka Derzsi

      Wigner Research Centre for Physics, Hungary, Wigner Research Centre for Physics, Hung

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  • The effect of a negative direct-current voltage on striated structures and electrical parameters in a capacitively coupled rf discharge in CF<sub>4</sub>

    ORAL

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    Presenters

    • Xiao-Kun Wang

      Dalian University of Technology

    Authors

    • Xiao-Kun Wang

      Dalian University of Technology

    • Yong-Xin Liu

      Dalian University of Technology

    • Quan-Zhi Zhang

      Dalian University of Technology

    • You-Nian Wang

      School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China, Dalian University of Technology

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  • Two-Dimensional Particle in Cell Simulation of Dual Frequency Effect in a Torrregime Capacitively Coupled Plasma

    ORAL

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    Publication: https://doi.org/10.1088/1361-6595/ac0a4c

    Presenters

    • Chang Ho Kim

      Department of Electrical Engineering, Pusan National University, Pusan National University

    Authors

    • Chang Ho Kim

      Department of Electrical Engineering, Pusan National University, Pusan National University

    • Hwan Ho Kim

      Department of Electrical Engineering, Pusan National University, Pusan National University

    • Ji Hyun Shin

      Department of Electrical Engineering, Pusan National University

    • Seo I Choi

      Department of Electrical Engineering, Pusan National University

    View abstract →