Plasma-surface Interactions I

Presentations

• Multiscale simulation on plasma-surface interaction: mitigation of leakage current at high-k metal oxide interface

  ORAL

  Oct. 5, 2021, 4:45 PM – Oct. 5, 2021, 5:00 PM

  Presenters

  • Byungjo Kim

    Samsung Electronics Co.

  Authors

  • Byungjo Kim

    Samsung Electronics Co.

  • Muyoung Kim

    Samsung Electronics Co.

  • Suyoung Yoo

    Samsung Electronics Co.

  • Sang Ki Nam

    Samsung Electronics, Samsung Mechatronics R&D center, Samsung Mechatronics R&D Center, Samsung Electronics Co.

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• Ion-induced secondary electron emission coefficient of metal surfaces analysed in an ion beam experiment

  ORAL

  Oct. 5, 2021, 5:00 PM – Oct. 5, 2021, 5:15 PM

  Presenters

  • Rahel Buschhaus

    Experimental Physics II, Bochum

  Authors

  • Rahel Buschhaus

    Experimental Physics II, Bochum

  • Achim von Keudell

    Ruhr-University Bochum, Experimental Physics II, Bochum

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• Study of plasma-surface interactions of CO2-CH4 plasma on CeO2 using in situ Infrared Transmission experiments

  ORAL

  Oct. 5, 2021, 5:15 PM – Oct. 5, 2021, 5:30 PM

  Publication: N/A

  Presenters

  • Carolina A Garcia Soto

    Laboratoire de Physique des Plasmas, Ecole Polytechnique

  Authors

  • Carolina A Garcia Soto

    Laboratoire de Physique des Plasmas, Ecole Polytechnique

  • Edmond Baratte

    Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, Ecole Polytechnique Institut Polytechnique de Paris, 91128 Palaiseau France, Laboratoire de Physique des Plasmas, Ecole Polytechnique, Laboratoire de Physique des Plasmas (UMR 7648), CNRS, Univ. Paris Saclay, Sorbonne Université, École Polytechnique, France

  • Vasile I Parvulescu

    University of Bucharest

  • Olivier Guaitella

    Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, Ecole Polytechnique Institut Polytechnique de Paris, 91128 Palaiseau France, Laboratory of Plasma Physics, École Polytechnique, Laboratoire de Physique des Plasmas, Laboratoire de Physique des Plasmas, Ecole Polytechnique, Laboratoire de Physique des Plasmas (UMR 7648), CNRS, Univ. Paris Saclay, Sorbonne Université, École Polytechnique, France

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• Plasma Diagnostics on an Atmospheric Pressure DC Microplasma Discharge Intended for in situ TEM Integration

  ORAL

  Oct. 5, 2021, 5:30 PM – Oct. 5, 2021, 5:45 PM

  Presenters

  • Luka Hansen

    Institute of Experimental and Applied Physics, Kiel University, Germany

  Authors

  • Luka Hansen

    Institute of Experimental and Applied Physics, Kiel University, Germany

  • Niklas Kohlmann

    Institute of Materials Science, Kiel University, Germany

  • Ulrich Schürmann

    Institute of Materials Science, Kiel University, Germany

  • Lorenz Kienle

    Institute of Materials Science, Kiel University, Germany

  • Holger Kersten

    Institute of Experimental and Applied Physics, Kiel University, Germany

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• From the role of Ar ions in the sputter deposition of Al films to a comprehensive surface surrogate model

  ORAL

  Oct. 5, 2021, 5:45 PM – Oct. 5, 2021, 6:00 PM

  Publication: T. Gergs, T. Mussenbrock, and J. Trieschmann, A Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films, in preparation.<br><br>T. Gergs, and J. Trieschmann, A comprehensive surface surrogate model for sputtering processes based on conditional variational autoencoder, in preparation.

  Presenters

  • Tobias Gergs

    Ruhr University Bochum

  Authors

  • Tobias Gergs

    Ruhr University Bochum

  • Thomas Mussenbrock

    Ruhr University Bochum, Bochum University, Ruhr Univ Bochum, Ruhr-University Bochum, Germany, Ruhr-University Bochum, Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University, Bochum, Germany

  • Jan Trieschmann

    Brandenburg University of Technology

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