Plasma Diagnostics: Electrical Diagnostics I
FOCUS · CT11 · ID: 14087
Presentations
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Modern Langmuir probe diagnostics
ORAL · Invited
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Presenters
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Valery A Godyak
RF Plasma Consulting, Brookline, Massachusetts 02446, USA and The Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109,
Authors
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Valery A Godyak
RF Plasma Consulting, Brookline, Massachusetts 02446, USA and The Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109,
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Analysis and Comparison of the Electron Temperatures and the Number Densities using a Single Langmuir Probe and Optical Emission Spectroscopic Diagnostic System
ORAL
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Presenters
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Kirk Boehm
PhD Candidate, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa
Authors
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Kirk Boehm
PhD Candidate, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa
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James D Rogers
The University of Alabama, PhD Candidate, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa
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Richard Branam
Associate Professor, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa, The University of Alabama, University of Alabama
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In-situ measurement of electron emission yield at silicon surfaces in Ar/CF<sub>4</sub> plasmas
ORAL
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Presenters
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Mark Sobolewski
National Institute of Standards and Tech
Authors
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Mark Sobolewski
National Institute of Standards and Tech
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Wireless Retarding Field Analyzer for Ion Energy Distribution Measurements in Plasma Processes
ORAL
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Presenters
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David Gahan
Impedans Ltd
Authors
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David Gahan
Impedans Ltd
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Paul Scullin
Impedans Ltd
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James Doyle
Impedans Ltd
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JJ Lennon
Impedans Ltd
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Andre Lochner
Impedans Ltd
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Relative calibration of a retarding field energy analyzer sensor array
ORAL
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Publication: S. Ries Rev. Sci. Instr. 2021 submitted: RSI21-AR-01316
Presenters
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Manuel Schröder
Ruhr-University Bochum, Germany
Authors
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Manuel Schröder
Ruhr-University Bochum, Germany
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Ihor Korolov
Ruhr Univ Bochum, Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr University Bochum, Bochum University, Ruhr Univ Bochum, Germany, Ruhr-University Bochum, Ruhr-University Bochum, Germany
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Stefan Ries
Ruhr-University Bochum, Germany
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David A. A Schulenberg
Ruhr-Universität Bochum, Germany, Ruhr-University Bochum, Germany
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Peter Awakowicz
Ruhr-University Bochum, Ruhr University Bochum, Ruhr Univ Bochum, Ruhr-University Bochum, Germany
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Julian Schulze
University of Bochum, Germany, Ruhr-Universität Bochum, Germany, Ruhr Univ Bochum, Bochum University, Ruhr University Bochum & Dalian University of Technology, Ruhr University Bochum, 44780 Bochum, Germany, Ruhr University Bochum, Ruhr University Bochum and Dalian University of Technology, Ruhr-University Bochum, Germany; Dalian University of Technology, China
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Experimental Diagnostics for Electrons and Atoms in Low Pressure Iodine Plasmas
ORAL
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Presenters
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Benjamin Esteves
Ecole Polytechnique, Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
Authors
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Benjamin Esteves
Ecole Polytechnique, Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
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Anne Bourdon
LPP, CNRS, Sorbonne Université, Ecole Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France, LPP, Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France, LPP, Ecole polytechnique, CNRS, Laboratoire de Physique des Plasmas, Laboratory of Plasma Physics, École Polytechnique, Laboratoire de Physique des Plasmas, LPP, CNRS, Sorbonne Universit\'e, Ecole Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
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Alejandro Alvarez Laguna
LPP, Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France, LPP, Ecole polytechnique, CNRS, Laboratoire de Physique des Plasmas, Laboratoire de Physique des Plasmas, CNRS, E. Polytechnique
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Pascal Chabert
Ecole Polytechnique, Ecole Polytechnique, France, LPP, Ecole polytechnique
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Cyril Drag
Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
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Fast-Sweeping Langmuir probes: What happens to the I-V trace when sweeping frequency is higher than the ion plasma frequency?
ORAL
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Presenters
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Chenyao Jin
University of Science and Technology of, Chinese Academy of Sciences; University of Science and Technology of China
Authors
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Chenyao Jin
University of Science and Technology of, Chinese Academy of Sciences; University of Science and Technology of China
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Chi-Shung Yip
Chinese Academy of Sciences
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Wei Zhang
Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China, Chinese Academy of Sciences
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Di Jiang
Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China, Chinese Academy of Sciences
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Guosheng Xu
Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China, Chinese Academy of Sciences
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