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Workshop I: Plasma Diagnostics

FOCUS · BM21 · ID: 13724

Presentations

  • Principles and some progress in floating probe method (FPM) for process plasma diagnostics and monitoring

    ORAL · Invited

    –

    Presenters

    • Chinwook Chung

      Hanyang University, Hanyang Univ., Hanyang Univ, Hanyang univ., Hanyang university

    Authors

    • Chinwook Chung

      Hanyang University, Hanyang Univ., Hanyang Univ, Hanyang univ., Hanyang university

    • Hyundong Eo

      Hanyang University

    • Moo-Young Lee

      Hanyang University, Hanyang university

    • Ho Won Lee

      Hanyang University

    View abstract →

  • Recent progress in infrared laser spectroscopy to characterize low and atmospheric pressure plasmas

    ORAL · Invited

    –

    Presenters

    • Jean-Pierre van Helden

      Leibniz Institute for Plasma Science and Technology (INP)

    Authors

    • Jean-Pierre van Helden

      Leibniz Institute for Plasma Science and Technology (INP)

    • Sarah Klose

      Leibniz Institute for Plasma Science and Technology (INP)

    • Ibrahim Sadiek

      Leibniz Institute for Plasma Science and Technology (INP)

    • Norbert Lang

      Leibniz Institute for Plasma Science and Technology (INP)

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  • Studies of O(<sup>1</sup>D) and HO<sub>2</sub> Kinetics in Plasma Assisted Low Temperature Fuel Oxidation Using Mid Infrared Faraday Rotation Spectroscopy

    ORAL · Invited

    –

    Publication: H. Zhong, C. Yan, C.C. Teng, T.Y. Chen, G. Wysocki, Y. Ju, Kinetic studies of excited singlet oxygen atom O (1D) reactions with ethanol, International Journal of Chemical Kinetics 53 (2021) 688-701.<br><br>H. Zhong, X. Mao, A.C. Rousso, C.L. Patrick, C. Yan, W. Xu, Q. Chen, G. Wysocki, Y. Ju, Kinetic studies of plasma assisted n-dodecane/O2/N2 pyrolysis and oxidation in a nanosecond-pulsed discharge, Proceedings of Combustion Insittute 38 (2021).

    Presenters

    • Yiguang Ju

      Princeton University

    Authors

    • Yiguang Ju

      Princeton University

    • Hongtao Zhong

      Princeton University

    • Chao Yan

      Princeton University

    View abstract →

  • Wave-cutoff probe: overview and achievements

    ORAL · Invited

    –

    Publication: [1] Appl. Phys. Lett., 83 4725 (2003). Rev. Sci. Instrum. 75 2706 (2004), Metrologia 42 110 (2005).<br>[2] Appl. Phys. Lett., 96, 081502 (2010). Rev. Sci. Instrum. 83, 013510 (2012).<br>[3] Appl. Phys. Lett. 91, 201502 (2007).<br>[4] Hyo-Chang Lee, Jung Hyung Kim, Dae, Daejin Seong, Hee Jung Yeom, PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS, WAFER-TYPE PLASMA DIAGNOSIS APPARATUS IN WHICH PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS IS BURIED, AND ELECTROSTATIC CHUCK IN WHICH PLANAR-TYPE PLASMA DIAGNOSIS APPARATUS IS BURIED, Korea Patent. 10-2020-0095022 , PCT Patent. PCT/KR2019/004500, US Patent. 17050373, China Patent. 201980028803.9, EU Patent. 19912976.8, Japan Patent. 52002369478, Plasma Sources Sci. Technol. 28 015004 (2019), Plasma Sources Sci. Technol. 29 035016 (2020), Plasma Sources Sci. Technol. in-press (https://doi.org/10.1088/1361-6595/abef1a)<br>[5] Plasma Sources Sci. Technol. 29 035016 (2020).<br>[6] Hyo-Chang Lee, Jung Hyung Kim, Dae, Hee Jung Yeom, Device for measuring plasma ion density and Apparatus for plasma diagnostics using the same, Korea Patent. 1020210038119, US Patent. 17222937, China Patent. 2021110374496.9, EU Patent. EP21167098.9, Japan Patent. 2021-062613

    Presenters

    • Hyo-Chang Lee

      Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science (KRISS), Korea Research Inst of Standards and Sci

    Authors

    • Hyo-Chang Lee

      Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science (KRISS), Korea Research Inst of Standards and Sci

    • Jung Hyung Kim

      Korea Research Institute of Standards and Science, Korea Research Institute of Standard and Science (KRISS), Korea Research Institute of Standards and Science (KRISS), Korea Research Institute of Standard and Science

    View abstract →