Increasing the surface production of negative ions from nitrogen doped diamond in low pressure hydrogen plasmas

G. Smith; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle; Clarisse Bourdelle

Increasing the surface production of negative ions from nitrogen doped diamond in low pressure hydrogen plasmas

ORAL

Abstract

Plasma negative ion sources are of interest for material surface processing and neutral beam injection. Incorporating dielectrics as plasma facing surfaces can increase plasma control, but maximising the production yield remains a challenge. In this study, we investigate the production of negative ions from nitrogen doped diamond films in a low pressure deuterium plasma via mass spectrometry and Raman spectroscopy. The incorporation of nitrogen dopant into the film increases the negative ion yield when its temperature reaches 550$^{\mathrm{o}}$C and it becomes conductive. Pulsing the bias voltage enables the enhanced yield of negative ions to be maintained at lower temperatures (30 - 450$^{\mathrm{o}}$C) when the film is otherwise non-conductive. To better understand the mechanisms for production of negative ions, we undertake fluid/Monte-Carlo simulations, implementing a chemistry set that includes 14 molecular vibrational states of hydrogen (P Diomede et al 2017 Plasma Sources Sci. Technol. 26 075007), gas heating, and a model dielectric surface. *We wish to acknowledge financial support from EPSRC (EP/L01663X/1) and the French research federation (FR-FCM). The participation of M Kushner was supported by the US National Science Foundation and the US Department of Energy's Office of Fusion Energy Science.

Oct. 8, 2020, 11:45 AM – Oct. 8, 2020, 12:00 PM

Authors

G. Smith

University of York
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France
Clarisse Bourdelle

Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France